Zobrazeno 1 - 10
of 19
pro vyhledávání: '"Tomokatsu Watanabe"'
Autor:
Tomokatsu Watanabe, Yutaka Fukui, Shiro Hino, Shingo Tomohisa, Naruhisa Miura, Kazuyasu Nishikawa
Publikováno v:
IEEE Transactions on Device and Materials Reliability. 23:99-108
Publikováno v:
IEEE Transactions on Electron Devices. 68:6321-6329
Publikováno v:
Materials Science Forum. 1004:565-570
We used the POCl3 gate technique for the fabrication of 4H-SiC vertical MOSFETs, and examined its effect on the VTH-RON tradeoff and the compatibility with device fabrication. The gate oxide film was formed by thermal dry O2 oxidation followed by POC
Publikováno v:
IEEE Transactions on Device and Materials Reliability. 17:163-169
The depletion-mode time-dependent dielectric breakdown (DM-TDDB) mechanism was investigated with n-type 4H-SiC MOS capacitors depleted by high-voltage dc bias. Under the DM-TDDB stress, the hole generation beneath the oxide/SiC interface and its inje
Publikováno v:
Materials Science Forum. :1035-1038
Forward voltage of SiC pin diodes is evaluated by device simulation, where a p-type contact is described by Schottky barrier to a p-type surface region. The contact resistance is calculated from the comparison to I-V characteristic of Schottky struct
Autor:
Naruhisa Miura, Tatsuo Oomori, Yukiyasu Nakao, Tomokatsu Watanabe, Keiko Fujihira, Masayuki Imaizumi, Yoichiro Tarui
Publikováno v:
Materials Science Forum. :999-1002
A major crystalline defect which causes a pn junction reverse leakage current has been identified. A faintish stripe defect (FSD), the main cause of the leakage current, was observed in about 90% of the current leak points of our pn diodes. Double sh
Publikováno v:
Materials Science Forum. :585-590
Crystalline recovery mechanism in the activation annealing process of Al implanted 4H-SiC crystals were experimentally investigated. Annealing temperature and annealing time dependence of acceptor activation and activated hole’s behavior were exami
Autor:
Tatsuo Oomori, Tetsuya Takami, Naoki Yutani, Keiko Fujihira, Naruhisa Miura, Ken Ichi Ohtsuka, Tomokatsu Watanabe, Yukiyasu Nakao, Masayuki Imaizumi
Publikováno v:
Materials Science Forum. :827-830
Inversion-type 4H-SiC power MOSFETs using p-body implanted with retrograde profiles have been fabricated. The Al concentration at the p-body surface (Nas) is varied in the range from 5×1015 to 2×1018 cm-3. The MOSFETs show normally-off characterist
Autor:
Shin Ichi Kinouchi, Naruhisa Miura, Yukiyasu Nakao, Tetsuya Takami, Masayuki Imaizumi, Keiko Fujihira, Yoichiro Tarui, Hiroshi Nakatake, Tatsuo Ozeki, Tomokatsu Watanabe
Publikováno v:
Materials Science Forum. :1289-1292
Prototype SiC power modules are fabricated using our class 10 A, 1.2 kV SiC-MOSFETs and SiC-SBDs, and their switching characteristics are evaluated using a double pulse method. Switching waveforms show that both overshoot and tail current, which indu
Autor:
Yoichiro Tarui, Tatsuo Ozeki, Yukiyasu Nakao, Tomokatsu Watanabe, Keiko Fujihira, Masayuki Imaizumi, Tatsuo Oomori, Tetsuya Takami, Hiroaki Sumitani, Naruhisa Miura
Publikováno v:
Materials Science Forum. :1285-1288
4H-SiC epilayer channel MOSFETs are fabricated. The MOSFETs have an n- epilayer channel which improves the surface where the MOS channel is formed. By the optimization of the epilayer channel and the MOSFET cell structure, an ON-resistance of 12.9 mc