Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Tomohisa Tokuda"'
Publikováno v:
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS).
This paper reports a multivariable piezoresistive pressure sensor equipped with a novel structure utilizing grayscale methods, wafer-level Surface Activated Bonding (SAB) and a combination technique of Bosch and Non-Bosch processes. The amalgamation
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1f6999c48399d2a62ca850391b2dfecc
https://doi.org/10.1109/memsys.2016.7421599
https://doi.org/10.1109/memsys.2016.7421599
Publikováno v:
Sensors and Actuators B: Chemical. 97:90-97
A copolymerized gel composed of poly(N-isopropylacrylamide) and acrylic acid was used to construct a mechanism that withdrew sample solution slowly. A gel of 11 mm ×11 mm ×4 mm was used and a volume change was caused by changing the temperature, ch
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::84a2bc6049531735b2f08ea5464c3a44
https://doi.org/10.1016/j.snb.2003.07.014
https://doi.org/10.1016/j.snb.2003.07.014
Publikováno v:
Transducers ’01 Eurosensors XV ISBN: 9783540421504
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3bca2d815141d48d6eb619398daa0f1a
https://doi.org/10.1007/978-3-642-59497-7_100
https://doi.org/10.1007/978-3-642-59497-7_100
