Výsledky vyhledávání - "Tomohiro Shiroi"

Relationship between Oxygen Additive Amount and Photoresist Removal Rate Using H Radicals Generated on an Iridium Hot-Wire Catalyst

Autor: Shiro Nagaoka, Masashi Yamamoto, Hironobu Umemoto, Tomokazu Shikama, Hideo Horibe, Tomohiro Shiroi

Publikováno v: Journal of Photopolymer Science and Technology. 32:609-614

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::efc812e56416785612b70bc4acff0406
https://doi.org/10.2494/photopolymer.32.609

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Photoresist removal using hydrogen radicals produced by tantalum hot-wire catalyst

Autor: Tomohiro Shiroi, Shiro Nagaoka, Tomokazu Shikama, Hideo Horibe, Masashi Yamamoto

Publikováno v: NANOSCIENCE AND NANOTECHNOLOGY: NANO-SciTech.

Photoresist removal method using hydrogen radicals produced by decomposing hydrogen on a hot-wire catalyst is one of an environmentally friendly methods. We examined the relationship between photoresist removal rate and its surface temperature and th

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::4666c47597353d15f51f381e560d9793
https://doi.org/10.1063/1.5124640

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Conference

Photoresist removal using hydrogen radicals produced by tantalum hot-wire catalyst.

Autor: Masashi Yamamoto, Tomohiro Shiroi, Tomokazu Shikama, Shiro Nagaoka, Hideo Horibe

Publikováno v: AIP Conference Proceedings; 2019, Vol. 2151 Issue 1, p020010-1-020010-6, 6p

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