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Autor:
Sergey Gorelick, Tommi Ylimäki, Timo Sajavaara, Mikko Laitinen, A. Sagari A.R., Harry J. Whitlow
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 260:77-80
A lithographic facility for writing patterns with ion beams from cyclotron beams is under development for the Jyvaskyla cyclotron. Instead of focusing and deflecting the beam with electrostatic and magnetic fields a different approach is used. Here a