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Autor:
Okrepka, G. M., Tomashik, V. М.
Publikováno v:
Physics and Chemistry of Solid State; Vol 16, No 4 (2015); 711-715
Фізика і хімія твердого тіла; Vol 16, No 4 (2015); 711-715
Фізика і хімія твердого тіла; Vol 16, No 4 (2015); 711-715
Selective etching is an express method to identify the defects of crystal structure of semiconductors. It reveals the dislocations density, type of conductivity, crystal’s orientation, inclusions/precipitates, twins. This article is the review of s