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pro vyhledávání: '"Tomas Hmcir"'
Publikováno v:
2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA).
An advanced sample preparation protocol using Xe+ Plasma FIB for cross-sections wider than 400 μm is proposed. Challenging samples such as a BGA (CSP) or chip in a package often suffer from FIB milling artifacts. The results are unsatisfactory mainl