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pro vyhledávání: '"Tomas Grigaitis"'
Publikováno v:
Thin Solid Films. 622:142-147
Luminescent cerium doped silicon light emitting devices on indium tin oxide coated glass have been fabricated using plasma enhanced chemical vapour deposition and sputtering techniques. The electrical and electroluminescent properties of the devices
Publikováno v:
Thin Solid Films. 585:20-23
Luminescent a-Si:H/SiN x superlattice structures (SLs) with different thicknesses of sublayers were fabricated on indium tin oxide coated glass by three electrode chemical vapour deposition chamber. Transmission electron micrograph revealed small amo
Publikováno v:
ResearcherID
Two series of amorphous silicon nitride films were deposited using a chemical vapour deposition (CVD) reactor with two and three electrodes. Nitrogen gas and silane diluted with argon mixture (5% SiH4 + 95% Ar) were used as the working gas. The silic