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Autor:
Carsten Hartmann, Andrea Dittmar, Klaus Irmscher, Frank Langhans, Albert Kwasniewski, Tom Neugut, Matthias Bickermann, Juergen Wollweber
Publikováno v:
Japanese Journal of Applied Physics. 52:08JA06
Freestanding AlN single crystals are grown in a RF-heated furnace by physical vapor transport (PVT). Three different growth regimes with growth temperatures between 2080–2200°C result in different crystal habits and very high structural quality. T