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Autor:
Tom M. Lehecka, Danny O'Neill MacCallum, Michele D. Steyskal, Chung-Nin Channy Wong, Jeremy A. Palmer, Gerald Albert Knorovsky, William Mark Scherzinger
It has been shown that thermal energy imparted to a metallic substrate by laser heating induces a transient temperature gradient through the thickness of the sample. In favorable conditions of laser fluence and absorptivity, the resulting inhomogeneo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d4bc54eb2f72aff3a049f02a3ceab47d
https://doi.org/10.2172/899077
https://doi.org/10.2172/899077
Autor:
Francisco Medina, John D. Williams, Ryan B. Wicker, Tom Lemp, Jeremy A. Palmer, Tom M. Lehecka
Publikováno v:
Micromachining and Microfabrication Process Technology XI.
This paper describes improvements that enable engineers to create three-dimensional MEMS in a variety of materials. It also provides a means for selectively adding three-dimensional, high aspect ratio features to pre-existing PMMA micro molds for sub