Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Todd F. Miller"'
Publikováno v:
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.
The paper presents a novel approach to evaluate and improve MEMS reliability even during design phase of new devices. Firstly, the shock induced failure mechanisms of breakage and stiction are characterized by test structures. The obtained results in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::578d2f89ff09a7b9af7c7e70e1823de6
https://doi.org/10.1109/transducers.2011.5969564
https://doi.org/10.1109/transducers.2011.5969564
Publikováno v:
2010 IEEE Sensors.
As part of the reliability investigation, shock tests for first generation surface micro-machined devices have been performed which showed susceptibility regarding stiction at the stopper elements and breakage of adjacent anchor points to the substra
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f75ad910ea00371820a86bdd71a2ec19
https://doi.org/10.1109/icsens.2010.5690685
https://doi.org/10.1109/icsens.2010.5690685
Autor:
Torsten Hauck, Todd F. Miller, David Lin, I. Schmadlak, G. Li, Vladimir Kolchuzhin, Jan Mehner
Publikováno v:
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.
The paper is focused on the influence of packaging technologies on the performance of inertial MEMS sensors. System simulations of MEMS are vital to evaluate and optimize the interplay of transducer cells with the sensor electronics. Special emphasis
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::093b1a8589a7dcf3d5cfbef1d0dd2dd2
https://doi.org/10.1109/sensor.2009.5285685
https://doi.org/10.1109/sensor.2009.5285685
Publikováno v:
Micro-Electro-Mechanical Systems (MEMS).
Surface micromachining is becoming increasingly popular for microelectromechanical systems (MEMS) and a new application for this process technology is pressure sensors. Uncompensated surface micromachined piezoresistive pressure sensors were fabricat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::870b65451d49037509ccba687314a9db
https://doi.org/10.1115/imece1999-0263
https://doi.org/10.1115/imece1999-0263
Publikováno v:
SPIE Proceedings.
Pressure sensors serve a variety of automotive applications, some which may experience high levels of acceleration such as tire pressure monitoring. To design pressure sensors for high acceleration environments it is important to understand their sen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e51caa98ceba41489cc025089d8e5750
https://doi.org/10.1117/12.360508
https://doi.org/10.1117/12.360508
Publikováno v:
SPIE Proceedings.
This paper looks at the issues related to the integration of pressure sensors with the control circuit necessary to achieve the demands of increased performance measured by such parameters as linearity, resolution, accuracy and temperature sensitivit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4d6d7d0a2cd39b622b5f4e963253fa36
https://doi.org/10.1117/12.361220
https://doi.org/10.1117/12.361220