Zobrazeno 1 - 10
of 11
pro vyhledávání: '"Tobias Wiesendanger"'
Publikováno v:
Optical Inspection of Microsystems ISBN: 9780429186738
This chapter reviews the confocal microscopy, a description of the depth-scanning fringe projection system, and an overview about low-coherence interferometric microscopy for the optical profiling of encapsulated Microelectromechanical Systems. The s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::45fb05c8690a4bb55347b791f1608aaa
https://doi.org/10.1201/9780429186738-7
https://doi.org/10.1201/9780429186738-7
Autor:
Yoshiaki Yasuno, Tobias Wiesendanger, Toyohiko Yatagai, Shuichi Makita, Aiko Ruprecht, Hans J. Tiziani
Publikováno v:
Optics Communications. 232:91-97
A simple wavefront evaluation method is proposed which employs only one Fourier transform lens, one CCD camera and a digital signal processing procedure. The optical setup is sufficiently simple to be used in numerous types of optical systems. The fe
Publikováno v:
Optical Review. 10:318-320
We propose a high-speed and parallel method to determine lens aberrations from its confocal axial response. This method analyzes the intensity confocal response including the aberration information of the objective lens by means of neural network alg
Autor:
Toyohiko Yatagai, Shuichi Makita, Yoshiaki Yasuno, Aiko Ruprecht, Tobias Wiesendanger, Hans J. Tiziani
Publikováno v:
Optics express. 11(1)
A non-axial-scanning confocal microscope employing a monochromatic light source has been developed. The system controls the defocus of an objective into three to .ve optimized states by using a membrane-adaptive mirror, and determines the axial heigh
Publikováno v:
Optical Science and Engineering ISBN: 9780849336829
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::446b94ec45770427b10988bb197066a5
https://doi.org/10.1201/9781420019162.ch5
https://doi.org/10.1201/9781420019162.ch5
Publikováno v:
Optics letters. 29(18)
Chromatic confocal microscopy has the advantage of short measurement times because of its parallel depth scan. As most white-light sources have limited optical output power, light-efficient setups are necessary. Using an extended detection pinhole is
Publikováno v:
Optical Metrology in Production Engineering.
Depth-scanning is an established technique in macroscopic and microscopic 3-D metrology. Representative in this context are the confocal technique and the white-light interferometry. A new fast depth-scanning technique has been applied to a confocal
Autor:
Aiko Ruprecht, S. Makita, Tobias Wiesendanger, Hans J. Tiziani, Toyohiko Yatagai, Yoshiaki Yasuno
Publikováno v:
CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on Lasers and Electro-Optics (IEEE Cat. No.03TH8671).
A non-axial-scanning confocal microscope by membrane mirror shape switching has been developed. The system controls the defocus of an objective by membrane mirror, and determines the height of an object from the confocal output value of each defocus.
Publikováno v:
Three-Dimensional Image Capture and Applications
The chromatic confocal approach enables the parallelization of the complete depth-scan of confocal topography measurements. Therefore, mechanical movement can be reduced or completely avoided and the measurement times shortened. Chromatic confocal po
Publikováno v:
Optical Review. 10:301-302
Fast characterisation and defect recognition of microlens arrays is a problem unsolved. Results of measurements using a system based on the confocal principle working in parallel to determine spherical aberrations, focal lengths and void elements of