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pro vyhledávání: '"Tjitte-Jelte Peters"'
Autor:
Tjitte-Jelte Peters, Marcel Tichem
Publikováno v:
Micromachines, Vol 7, Iss 11, p 200 (2016)
This paper describes the design, fabrication and characterization of electrothermal bimorph actuators consisting of polysilicon on top of thick (>10 μ m ) silicon dioxide beams. This material platform enables the integration of actuators with photon
Externí odkaz:
https://doaj.org/article/56cebec9a2644203b019addcada72462
Autor:
Marcel Tichem, Tjitte-Jelte Peters
Publikováno v:
IEEE Journal of Microelectromechanical Systems, 26(6)
In this paper, we present positionable photonic waveguide arrays that are developed for optical chip-to-chip alignment. Partly suspended photonic structures, based on the Si3N4/SiO2 material platform, are equipped with thermal actuators enabling the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c0b882a58b9a064b386c850333b52b73
http://resolver.tudelft.nl/uuid:8e8d5818-5e34-458a-8fd8-2eb35fa55030
http://resolver.tudelft.nl/uuid:8e8d5818-5e34-458a-8fd8-2eb35fa55030
Autor:
Marcel Tichem, Tjitte-Jelte Peters
Publikováno v:
Micromachines; Volume 7; Issue 11; Pages: 200
Micromachines
Micromachines, Vol 7, Iss 11, p 200 (2016)
Micromachines, 7(11)
Micromachines
Micromachines, Vol 7, Iss 11, p 200 (2016)
Micromachines, 7(11)
This paper describes the design, fabrication and characterization of electrothermal bimorph actuators consisting of polysilicon on top of thick (>10 μ m ) silicon dioxide beams. This material platform enables the integration of actuators with photon
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::da7204e9d76987b2b53ab47ee7e6bc2d
Autor:
Martin Herman Siekman, M.J. de Boer, W.W. Koelmans, Tjitte-Jelte Peters, Erwin Berenschot, Leon Abelmann
Publikováno v:
Nanotechnology, 23(13), 135301-135309. Institute of Physics (IOP)
Cantilever arrays are employed to increase the throughput of imaging and manipulation at the nanoscale. We present a fabrication process to construct cantilever arrays with nanotips that show a uniform tip-sample distance. Such uniformity is crucial,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c881d917d641d993a23a089a5427bc7e
https://doi.org/10.1088/0957-4484/23/13/135301
https://doi.org/10.1088/0957-4484/23/13/135301
Publikováno v:
Proceedings of SPIE 9133: Silicon Photonics and Photonic Integrated Circuits IV, Brussels, Belgium, 14-17 April 2014
This paper presents a new alignment concept for the alignment of multichannel photonic intergrated circuits (PICs) using flexible photonic waveguides on one of the PICs that are positionable by integrated micro electro mechanical system (MEMS) actuat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::aa82f74ddedb50de1cd1285a66c03cbd
http://resolver.tudelft.nl/uuid:6905dadc-d7c8-4836-8d3e-41eb489310ab
http://resolver.tudelft.nl/uuid:6905dadc-d7c8-4836-8d3e-41eb489310ab
Autor:
Tjitte-Jelte Peters, Marcel Tichem, Vincent Adrianus Henneken, Johan Frederik Cornelis van Gurp
Publikováno v:
2012 4th Electronic System-Integration Technology Conference.
In the manufacturing of photonic packages, the alignment of the components must often meet strict precision demands. For several applications, sub-micrometre alignment must be achieved, and this precision needs to be maintained once the components ar
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::84409d7df23f0827580d088140713413
https://doi.org/10.1109/estc.2012.6542172
https://doi.org/10.1109/estc.2012.6542172
Autor:
Tjitte-Jelte Peters, Marcel Tichem
Publikováno v:
Journal of Micromechanics and Microengineering. 25:105003
This paper proposes a microfabrication process for the reliable release of SiO2 beam structures. These structures are intended to be utilized in SiO2 photonic MEMS. A major fabrication challenge is the release of thick (>10 ?m) SiO2 structures with h
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d2caa0ab1c90ad845e6b7402b9785fb7
https://doi.org/10.1088/0960-1317/25/10/105003
https://doi.org/10.1088/0960-1317/25/10/105003
Publikováno v:
Delft University of Technology
Mikroniek: vakblad voor precisie-technologie, 58(4)
Mikroniek: vakblad voor precisie-technologie, 58(4)
Recent decades have seen impressive developments in the field of integratedphotonics. Chips with complex photonic functionality can presently be designedand fabricated. Photonic packages consist of one or more PICs, as well as other(micro-optical) co
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::1cdd0d7219976cb939bfa8ff69c03232
https://research.tudelft.nl/en/publications/3288f922-5a6d-4527-ab4c-274a838dd315
https://research.tudelft.nl/en/publications/3288f922-5a6d-4527-ab4c-274a838dd315