Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Tjitte Nooitgedacht"'
Autor:
Greg Yang, Insung Kim, Natalia Davydova, Chris Strolenberg, Rasmus B. Nielsen, Tjitte Nooitgedacht, Jeong-ho Yeo, Shawn Lee, Peter Nikolsky, Chang-min Park
Publikováno v:
SPIE Proceedings.
As the ITRS Critical Dimension Uniformity (CDU) specification shrinks, semiconductor companies need to maintain a high yield of good wafers per day and a high performance (and hence market value) of finished products. This cannot be achieved without
Autor:
Natalia Davydova, Shawn Lee, Tjitte Nooitgedacht, Insung Kim, Chang-min Park, Rasmus B. Nielsen, Greg Yang, Jeong-ho Yeo, Chris Strolenberg, Peter Nikolsky
Publikováno v:
Journal of Micro/Nanolithography, MEMS, and MOEMS. 12:021006
As the International Technology Roadmap for Semiconductors critical dimension uniformity (CDU) specification shrinks, semiconductor companies need to maintain a high yield of good wafers per day and high performance (and hence market value) of finish