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pro vyhledávání: '"Timothy Sherlock"'
Autor:
Julia Litvinov, Azeem Nasrullah, Timothy Sherlock, Yi-Ju Wang, Paul Ruchhoeft, Richard C Willson
Publikováno v:
PLoS ONE, Vol 7, Iss 5, p e37440 (2012)
Ion Beam Aperture Array Lithography was applied to top-down fabrication of large dense (10(8)-10(9) particles/cm(2)) arrays of uniform micron-scale particles at rates hundreds of times faster than electron beam lithography. In this process, a large a
Externí odkaz:
https://doaj.org/article/aa4f59c31c5e470d8933d2ff67ab7ce2
Autor:
Timothy Sherlock, Yi Ju Wang, Julia Litvinov, Paul Ruchhoeft, Richard C. Willson, Azeem Nasrullah
Publikováno v:
PLoS ONE, Vol 7, Iss 5, p e37440 (2012)
PLoS ONE
PLoS ONE
Ion Beam Aperture Array Lithography was applied to top-down fabrication of large dense (10(8)-10(9) particles/cm(2)) arrays of uniform micron-scale particles at rates hundreds of times faster than electron beam lithography. In this process, a large a