Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Timothy G. Dunham"'
Autor:
Lars W. Liebmann, Mark A. Lavin, Timothy G. Dunham, Alfred K. K. Wong, William C. Leipold, S. M. Mansfield
Publikováno v:
IBM Journal of Research and Development. 45:651-665
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::52ad6489662a8833b975d6d0039b1619
https://doi.org/10.1147/rd.455.0651
https://doi.org/10.1147/rd.455.0651
Publikováno v:
SPIE Proceedings.
Optical Rule Checking (ORC) is an important vehicle to predict the failure of wafer shapes due to the process proximity effects. Optical Proximity Correction (OPC) if not aided by ORC may cause severe failures affecting the yield in manufacturing. Ho
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::639b37fd9f1e6d87cdb5dcce04836dd9
https://doi.org/10.1117/12.485477
https://doi.org/10.1117/12.485477
Autor:
Timothy G. Dunham, William C. Leipold
Publikováno v:
SPIE Proceedings.
ASIC layout data, which can be large and typically with little hierarchy, can prove challenging for complex optical proximity correction (OPC) operations. Thoughtful coordination between the ASIC library designers and the OPC code developers in terms
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ba55329ac0d22e5a320e60c0a48af894
https://doi.org/10.1117/12.410686
https://doi.org/10.1117/12.410686