Zobrazeno 1 - 10
of 91
pro vyhledávání: '"Timothy A. Brunner"'
Autor:
Timothy A. Brunner, Vincent Truffert, Christopher Ausschnitt, Nicola Kissoon, Edouard Duriau, Tom Jonckers, Lieve van Look, Joern-Holger Franke
Publikováno v:
International Conference on Extreme Ultraviolet Lithography 2022.
Autor:
Timothy A. Brunner, Jara Garcia Santaclara, Christopher N. Anderson, Patrick P. Naulleau, Gerardo Bottiglieri
Publikováno v:
Extreme Ultraviolet (EUV) Lithography XII.
We have used the MET5 exposure system using “dark field” lithography, where a small σ=0.1 source is wholly contained in the 30% Central Obscuration of the 0.5NA mirror optics. One goal of this paper is to quantify and explain the superior image
Autor:
Gijsbert Rispens, Timothy A. Brunner, Danilo De Simone, Anthony Yen, Bernd Geh, Jara Garcia Santaclara, Joren Severi
Publikováno v:
Extreme Ultraviolet (EUV) Lithography XI.
As feature sizes continue to shrink, low-k1 lithographic processes are required to advance chip technologies. In this context, both advances in optical systems and imaging capabilities as well as improvements in EUV photoresist have led to practical
Autor:
Timothy A. Brunner, Harry J. Levinson
Publikováno v:
International Conference on Extreme Ultraviolet Lithography 2018.
The semiconductor industry is on the threshold of using extreme ultraviolet (EUV) lithography in high volume manufacturing (HVM). Nevertheless, there are several areas where improvement in this lithographic technology would be very beneficial, most n
Publikováno v:
International Conference on Extreme Ultraviolet Lithography 2018.
As the power of laser produced plasma sources has increased, EUV lens heating has become a major component of process variation. Differential lens heating can cause thermal aberrations which affect system drift during operation, therefore pupil plane
Autor:
Alec J. Davern, Shannon E. Grady, Sandra D. Taylor, Timothy J. Brunner, George E. Moore, Timothy B. Lescun, Bruce R. Cooper
Publikováno v:
Journal of Equine Veterinary Science. 94:103204
The objective was to compare the analgesic efficacy of ketorolac tromethamine (KT) and two other nonsteroidal anti-inflammatory drugs (NSAIDs), including flunixin meglumine (FM) and phenylbutazone (PB), using a heart bar shoe (HBS) model of reversibl
Autor:
Alec J. Davern, George E. Moore, Timothy B. Lescun, Sandra D. Taylor, Shannon E. Grady, Timothy J. Brunner
Publikováno v:
Journal of Equine Veterinary Science. 87:102925
The mechanism by which nonsteroidal anti-inflammatory drugs mitigate pain caused by a heart bar shoe (HBS) model of lameness is unknown. The purpose of this study was to determine if this HBS model of lameness induces inflammation in horses. Five hea
Autor:
Andrew C. Brendler, James A. Culp, Xuemei Chen, Harry J. Levinson, Timothy A. Brunner, Allen H. Gabor
Publikováno v:
Extreme Ultraviolet (EUV) Lithography IX.
The relationship between edge placement error, semiconductor design-rule determination and predicted yield in the era of EUV lithography is examined. This paper starts with the basics of edge placement error and then builds up to design-rule calculat
Autor:
Erik Verduijn, Dirk Hellweg, Timothy A. Brunner, Grizelda Kersteen, Renzo Capelli, Obert Wood, Martin Dietzel, Xuemei Chen
Publikováno v:
Extreme Ultraviolet (EUV) Lithography IX.
As more aggressive EUV imaging techniques and resists with lower intrinsic roughness are developed for patterning at 7nm and 5nm technology nodes, EUV mask roughness will contribute an increasing portion of the total printed linewidth roughness (LWR)
Autor:
Mark van de Kerkhof, Joost Bekaert, Eric Hendrickx, Michiel Kupers, Erik Verduijn, Christophe Beral, Peter De Bisschop, Guido Schiffelers, Sander Bouten, Timothy A. Brunner
Publikováno v:
Extreme Ultraviolet (EUV) Lithography IX.
Vote-taking lithography is a method for mitigating mask defects, which has been applied in the 1980’s to enhance yield. Vote-taking sums up N different mask images with identical content, each at 1/N dose, to mitigate the defects on each individual