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pro vyhledávání: '"Tim Olschewski"'
Autor:
Markus Morgenstern, Tim Olschewski, Marco Pratzer, Florian Muckel, Jan Raphael Bindel, Simon Mathioudakis, Marcus Liebmann, Priyamvada Bhaskar
We present a mask aligner driven by three piezo motors which guides and aligns a SiN shadow mask under capacitive control towards a sample surface. The three capacitors for read out are located at the backside of the thin mask such that the mask can
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5bd43896ab51c7fe6cd3ee86931a7bbd
