Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Tilo Mantei"'
Autor:
Jürgen Niess, Boris Bayha, Georg Roters, Michael Raab, Christoph Kirchner, Rolf Stephan, Susanne Ohsiek, Tilo Mantei, Karsten Wieczorek, Martin Trentzsch, Waltraud Dietl, Zsolt Nenyei, Christian Golz, Wilfried Lerch
Publikováno v:
Materials Science Forum. :153-163
In this work we present a comprehensive comparison of ultra thin thermally nitrided (TN) to plasma nitrided (PN) gate dielectrics (GD). We will show that thermal nitridation is a promising technique to increase the nitrogen concentration up to 25%. F
Autor:
Lutz Herrmann, Manfred Horstmann, M Greenlaw, B. Bayha, E. Ehrichs, Tilo Mantei, M. Herden, Thomas Feudel, Martin Gerhardt, Gert Burbach
Publikováno v:
ECS Transactions. 6:373-380
Process parameter fluctuations have a strong impact on functionality and performance of CMOS logic circuits and memory cells. Tight control of transistor gate length and final anneal temperature are equally important. We have developed a strategy to
Autor:
M. Majer, Maciej Wiatr, S. J. Wong, Casey Scott, V. Shah, D. Greenlaw, Rolf Geilenkeuser, T. Rodes, Karsten Wieczorek, Tilo Mantei, Richard Heller, Manfred Horstmann, E. Pruefer, Jan Hoentschel
Publikováno v:
2009 IEEE International Reliability Physics Symposium.
The impact of HCI and NBTI on device DC, Ring Oscillator (RO) AC as well as on the degradation of product operating frequency (F MAX ) has been extensively studied. We have developed a method, which allows the compensation of HCI/NBTI-related device