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Design of RF Feedthroughs in Zero-Level Packaging for RF MEMS Implementing TSVs

Autor: El Gannudi, H., Farinelli, Paola, Pham, N., Bogaerts, L., Tilmans, H., Sorrentino, Roberto

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::c78b45abe04f76c988675e10449ebc86
http://hdl.handle.net/11391/948985

Distributed dielectric charging and its impact on RF MEMS devices

Autor: Rottenberg, X., Bart Nauwelaers, Raedt, W., Tilmans, H. A. C.

Publikováno v: 34th European Microwave Conference (EuMC), OCT 12-14, 2004, Amsterdam, NETHERLANDS
34TH European microwave conference, vols 1-3, conference proceedings
Rottenberg, X. ; Nauwelaers, B. ; De Raedt, W. ; Tilmans, H. A. C. (2004) Distributed dielectric charging and its impact on RF MEMS devices. In: Gallium Arsenide applications symposium. GAAS 2004, 11—12 Ottobre, Amsterdam.
Scopus-Elsevier

This paper gives a new insight into the problem of RF MEMS irreversible stiction due to dielectric charging. Previous reported works describing the phenomenon only account for a drift of the actuation characteristics as a whole as they consider unifo

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::638b4b886ed392fd3b907cabbc6a5662
https://hdl.handle.net/10067/1037750151162165141

Contact reliability improvement of a poly-SiGe based nano-relay with titanium nitride coating.

Autor: Ramezani, M., Severi, S., Moussa, A., Osman, H., Tilmans, H. A. C., De Meyer, K.

Publikováno v: 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators & Microsystems (TRANSDUCERS); 2015, p576-579, 4p

B-field characterization and equivalent circuit modeling of a poly-SiGe-MEMS based Xylophone Bar Magnetometer.

Autor: Farghaly, M. A., Rochus, V., Rottenberg, X., Mohammed, U. S., Tilmans, H. A. C.

Publikováno v: 2014 15th International Conference on Thermal, Mechanical & Multi-Physics Simulation & Experiments in Microelectronics & Microsystems (EuroSimE); 2014, p1-6, 6p