Výsledky vyhledávání - "Tilman Thrum"

Meeting the Challenge of New Generation Solar Cell Testing Large Area Long Pulse I-V-Curve Tracing

Autor: Tilman Thrum, David M. Carhm, Dean Allister Parfeniuk, Dirk Slootweg

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::20e19f5ea3e389f592f7f0f2545b4386
https://doi.org/10.4324/9781315074405-63

Zobrazit plný text záznamu

Flash-assist RTP for ultra-shallow junctions

Autor: G. C. Stuart, J. Gelpey, Tilman Thrum, S. McCoy, David Malcolm Camm

Publikováno v: JOM. 58:32-34

This paper discusses the engineering of ultra-shallow junctions for advanced semiconductors using an annealing technique called Flash-Assist RTPTM (fRTP). This technique offers effective process times in 1–10 ms. A discussion on the evolution of ra

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::02585472bf865456428b03df868cf0b0
https://doi.org/10.1007/s11837-006-0177-7

Zobrazit plný text záznamu

Engineering ultra-shallow junctions using fRTP/sup TM

Autor: J. Gelpey, Tilman Thrum, G. C. Stuart, J.K. Elliott, David Malcolm Camm

Publikováno v: 10th IEEE International Conference of Advanced Thermal Processing of Semiconductors.

This paper discusses engineering of ultra-shallow junctions using a new annealing technique called Flash-assist RTP/sup TM/ (fRTP). This technique offers effective process times in the 1-10 ms range, which fills the gap between traditional RTP and la

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::4507d8da09acb5848d799acd8a933af8
https://doi.org/10.1109/rtp.2002.1184454

Zobrazit plný text záznamu

Vyhledávací nástroje:

Upřesnit hledání