Design and Characterization of 5 μm Pitch InGaAs Photodiodes Using In Situ Doping and Shallow Mesa Architecture for SWIR Sensing †.

Autor: Tillement, Jules^1,2,3 (AUTHOR) jules.tillement@st.com, Cervera, Cyril² (AUTHOR), Baylet, Jacques² (AUTHOR), Jany, Christophe² (AUTHOR), Nardelli, François² (AUTHOR), Di Rito, Thomas² (AUTHOR), Georges, Sylvain¹ (AUTHOR), Mugny, Gabriel¹ (AUTHOR), Saxod, Olivier² (AUTHOR), Gravrand, Olivier² (AUTHOR), Baron, Thierry³ (AUTHOR), Roy, François¹ (AUTHOR), Boeuf, Frédéric¹ (AUTHOR) jules.tillement@st.com

Publikováno v: Sensors (14248220). Nov2023, Vol. 23 Issue 22, p9219. 16p.