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Autor:
Tsu-Chin Tsao, Greg Caskey, Ozkan Ozturk, Ronnie R. Fesperman, James Phipps, Robert J. Hocken, Tiffany Lemmons, Shalom D. Ruben, John Brien
Publikováno v:
Precision Engineering. 36:517-537
In this article we describe the design of a universal ultra-precision positioning platform to be used in the development of many different nano-manufacturing processes. The system incorporates the concept of employing different interchangeable manufa