Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Tian-Yan Yu"'
Autor:
Ling-Shan Gao, Qing-Yuan Cai, Er-Tao Hu, Qiu-Yu Zhang, Yu-Ting Yang, Yun-Bo Xiong, Bao-Jian Liu, Wei-Bo Duan, Tian-Yan Yu, Ding-Quan Liu
Publikováno v:
Optics Express. 31:13503
Optimizing the atomic layer deposition (ALD) process of films is particularly important in preparing multilayer interference films. In this work, a series of Al2O3/TiO2 nano-laminates with a fixed growth cycle ratio of 1:10 were deposited on Si and f
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3e3dd25d7c6710f0cb4b032dd98ce557
https://doi.org/10.1364/oe.487881
https://doi.org/10.1364/oe.487881
Publikováno v:
Eighth Symposium on Novel Photoelectronic Detection Technology and Applications.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::192e2c16e037460dd8e676519d34c8f2
https://doi.org/10.1117/12.2625196
https://doi.org/10.1117/12.2625196