Zobrazeno 1 - 10
of 46
pro vyhledávání: '"Thomas W. Peterson"'
Publikováno v:
Current Psychiatry. 19
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d80ce8aae77b8d2c05c22436222179d1
https://doi.org/10.12788/cp.0001
https://doi.org/10.12788/cp.0001
Autor:
D. Seif, Jun Yan, Bert Vermeire, Srini Raghavan, Farhang Shadman, Thomas W. Peterson, Hugh J. Barnaby
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 17:531-537
Developing efficient wafer cleaning and rinsing requires technology for on-line monitoring of the wafer cleanliness. An electrochemical sensor is designed, fabricated, and tested to measure the concentration of residual contaminants on the wafer surf
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ce47f1b17c2dc52326b19c5fb00dfdd3
https://doi.org/10.1109/tsm.2004.837001
https://doi.org/10.1109/tsm.2004.837001
Autor:
Joseph R. Morency, Gerald P. Huffman, Frank E. Huggins, Baochun. Wu, Farhang Shadman, Thomas W. Peterson, Constance L. Senior
Publikováno v:
Fuel Processing Technology. 63:93-107
Data suggest that coal-fired power plants are a significant source of atmospheric mercury. Predicting emissions of mercury and the speciation of mercury in combustion emissions cannot be done without a fundamental understanding of the chemical reacti
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d874ea34a830f02488a1591a5f4ed814
https://doi.org/10.1016/s0378-3820(99)00091-0
https://doi.org/10.1016/s0378-3820(99)00091-0
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 14:550-555
Particle formation during low pressure SF6/argon etching of silicon in a single wafer parallel plate reactor is studied. Particles are extracted from the exhaust and collected on the wafer. Particle composition and morphology depend on plasma power,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d5e32a73e76ac3933b653d2192155664
https://doi.org/10.1116/1.580143
https://doi.org/10.1116/1.580143
Publikováno v:
Combustion and Flame. 100:262-270
The partitioning of iron during pulverized coal combustion was investigated both experimentally and theoretically. Emphasis was on determining how coal variables and combustion conditions influenced the formation of slagging precursors. Experimental
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f5abc3fcb24ca034e36a05667382155a
https://doi.org/10.1016/0010-2180(94)00068-4
https://doi.org/10.1016/0010-2180(94)00068-4
Publikováno v:
Fuel Processing Technology. 39:357-372
The use of sorbents to control trace metal emissions from combustion processes was investigated, and the underlying mechanisms governing the interactions between trace metals and sorbents, were explored. Emphasis was on mechanisms in which the metal
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c9e9caac9adbb0bfc51ab8df562dc387
https://doi.org/10.1016/0378-3820(94)90192-9
https://doi.org/10.1016/0378-3820(94)90192-9
Publikováno v:
Symposium (International) on Combustion. 24:1109-1117
Experiments on a 17 KW downflow combustor determined how sorbent injection into the post flame influenced the particle size distribution of a lead aerosol formed from a surrogate lead containing waste. In the absence of chlorine, the lead aerosol siz
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7df34cdfe789a96b6c49346b97a29162
https://doi.org/10.1016/s0082-0784(06)80131-1
https://doi.org/10.1016/s0082-0784(06)80131-1
Publikováno v:
Combustion Science and Technology. 74:211-221
The relationship between the original form of sodium and potassium in coal and the ultimate fate of these metals was explored through experimentation in a 17kw laboratory downflow combustor. Composition analyses of size segregated samples of airbone
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c6dd864f3ad42b62e74c79fc33fdefef
https://doi.org/10.1080/00102209008951689
https://doi.org/10.1080/00102209008951689
Publikováno v:
International Conference on Microelectronic Test Structures, 2003..
An electrochemical sensor (trench device) is designed to measure wafer contaminant concentrations during ultra-pure water rinses. Electrical measurements on these structures enable the identification and modeling of the mechanisms of chemical contami
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ff7b588f51008b7cc5e42095c214ce3d
https://doi.org/10.1109/icmts.2003.1197463
https://doi.org/10.1109/icmts.2003.1197463
Publikováno v:
MRS Proceedings. 477
This work is an effort to determine if we can use less water effectively in rinse processes. We have run experiments to examine our current usage and to determine if we can use water more effectively.This work will describe the experiments which have
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::17b054fef650f781625085fdc0c1b4bb
https://doi.org/10.1557/proc-477-527
https://doi.org/10.1557/proc-477-527