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pro vyhledávání: '"Thomas S. Whitney"'
Autor:
Malar Chellasivalingam, Arthur T. Zielinski, Thomas S. Whitney, Adam M. Boies, Ashwin A. Seshia
Publikováno v:
Sensors, Vol 22, Iss 15, p 5485 (2022)
This paper reports on the design, and implementation of piezoelectric-on-silicon MEMS resonators installed within a portable experimental setup for sensing nanoparticles in a laboratory environment. MEMS oscillators with a center frequency of approxi
Externí odkaz:
https://doaj.org/article/1335720a360e44b381b7d35d4b003ccc