Zobrazeno 1 - 10
of 16
pro vyhledávání: '"Thomas R. Ohnstein"'
Publikováno v:
Sensors and Actuators A: Physical. 79:245-250
This paper discusses the failure modes frequently encountered in touch-mode electrostatic actuators (TMEA) and reports on practical ways of increasing the time to failure. Humidity is identified as the main source of anomalies in the behavior of TMEA
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6f123920b9ae50634f77f39908ba8947
https://doi.org/10.1016/s0924-4247(99)00281-2
https://doi.org/10.1016/s0924-4247(99)00281-2
Publikováno v:
Sensors and Actuators A: Physical. 53:386-391
Magnetically driven linear micro-actuators with 1 mN output force and hundreds of microns of total travel have been realized using LIGA-like processing techniques. These devices are driven at resonance frequencies of around 350 Hz and exhibit quality
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4551db28651109ab896f6fb52fbe8cbd
https://doi.org/10.1016/0924-4247(96)01137-5
https://doi.org/10.1016/0924-4247(96)01137-5
Autor:
Thi A. Nguyen, Kelly E. Stevens, Son T. Lu, Jason M. Amini, Alexa W. Harter, Thomas R. Ohnstein, Kenton R. Brown, Spencer D. Fallek, Robert E. Higashi, Nicholas D. Guise, Curtis Volin, Helen M. Chanhvongsak, Daniel W. Youngner, Matthew S. Marcus
Publikováno v:
Journal of Applied Physics. 117:174901
State-of-the-art microfabricated ion traps for quantum information research are approaching nearly one hundred control electrodes. We report here on the development and testing of a new architecture for microfabricated ion traps, built around ball-gr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::940fceb5c01b59356bfd77fb764777c1
https://doi.org/10.1063/1.4917385
https://doi.org/10.1063/1.4917385
Publikováno v:
Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.
Magnetically driven linear micro actuators with 1 mN output force and hundreds of microns of total travel have been realized using LIGA-like processing techniques. These devices are driven at resonant frequencies of around 350 Hz an exhibit quality f
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ad9b7fda940854aaf20630b7925ef1a1
https://doi.org/10.1109/sensor.1995.717184
https://doi.org/10.1109/sensor.1995.717184
Autor:
B.D. Speldrich, I. Glasgow, J.D. Zook, J.A. Cox, T.J. Wagener, Thomas R. Ohnstein, T.R. Christenson, Henry Guckel, E.T. Klein
Publikováno v:
Proceedings IEEE Micro Electro Mechanical Systems. 1995.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d1ea357e00b739290bd79d126921cdd4
https://doi.org/10.1109/memsys.1995.472585
https://doi.org/10.1109/memsys.1995.472585
Publikováno v:
1998 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e6876f4b0e5115a9d4676c20b6716f5c
https://doi.org/10.31438/trf.hh1998.68
https://doi.org/10.31438/trf.hh1998.68
Publikováno v:
SPIE Proceedings.
Using LIGA techniques, a transmissive diffraction grating device in permalloy with variable, and controllable, grating period has been designed and fabricated for use as a tunable infrared spectral filer. Typical device parameters exhibit parameters
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::80e413a5eecefa1b593bd62a2be5b66c
https://doi.org/10.1117/12.271426
https://doi.org/10.1117/12.271426
Publikováno v:
1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0e7b0ee3f84bbc7d3ac1c9748d7f3642
https://doi.org/10.31438/trf.hh1996.45
https://doi.org/10.31438/trf.hh1996.45
Autor:
J. Klein, D.P. Siddons, J.D. Zook, T.R. Christenson, E.D. Johnson, H. Guckel, T. Earles, P.S. Mangat, H. Emmerich, S. Massoud-Ansari, Thomas R. Ohnstein
Publikováno v:
1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::44ab7adbf0faa7d0abb3a22631862d25
https://doi.org/10.31438/trf.hh1996.14
https://doi.org/10.31438/trf.hh1996.14
Publikováno v:
SPIE Proceedings.
LIGA technology has been used to fabricate linear gratings having free-standing nickel walls a few micrometers wide and as much as 50 micrometers high and period on the order of 10 micrometers . With additional MEMS processing steps, such as devices
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::067f6e8a2f1d4602448dafa5714128d6
https://doi.org/10.1117/12.209021
https://doi.org/10.1117/12.209021