Zobrazeno 1 - 10
of 22
pro vyhledávání: '"Thomas Korb"'
Autor:
Jens Timo Neumann, Abhilash Srikantha, Philipp Hüthwohl, Keumsil Lee, James William B., Thomas Korb, Eugen Foca, Tomasz Garbowski, Daniel Boecker, Sayantan Das, Sandip Halder
Publikováno v:
Journal of Micro/Nanopatterning, Materials, and Metrology. 22
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ab43b81fec90cbda9a94fa9ef6ea1aed
https://doi.org/10.1117/1.jmm.22.2.021009
https://doi.org/10.1117/1.jmm.22.2.021009
Autor:
Eugen Foca, Dmitry Klochkov, J. T. Neumann, Keum Sil Lee, Ramani Pichumani, Thomas Korb, Amir Avishai, Sheetal B. Gupta, Alex Buxbaum
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXXIV.
We demonstrate the application of 3D tomography by FIB-SEM to analyze channel holes in 3D-NAND. We automatically analyze the 3D channel profiles for size, shape, and placement from the reconstructed full 3D volume. As the data contains thousands of h
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::45409f12cfd3a63edd6706f496bf2138
https://doi.org/10.1117/12.2552006
https://doi.org/10.1117/12.2552006
Publikováno v:
International Symposium for Testing and Failure Analysis.
This paper describes the application of 3D FIB-SEM tomography as a method for quantifying process variations across the die and across the wafer, as well as layout investigations. In this study, the analysis of results acquired by 3D FIB-SEM tomograp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5ae20e3fb0673bee66f126006f426cc4
https://doi.org/10.31399/asm.cp.istfa2019p0209
https://doi.org/10.31399/asm.cp.istfa2019p0209
High-throughput multi-beam SEM: quantitative analysis of imaging capabilities at IMEC-N10 logic node
Autor:
Sandip Halder, Thomas Korb, W. Högele, Philippe Leray, J. T. Neumann, Reiner Garreis, Dirk Zeidler, M. le Maire, Tomasz Garbowski
Publikováno v:
SPIE Proceedings.
We use the ZEISS MultiSEM to inspect patterns on separated chips of a semiconductor wafer suited for process window characterization at imec-N10 logic node. We systematically analyze the impact of imaging parameters of the MultiSEM on quantitative me
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cdcad9f78fa82c0d638ae82eeea406d0
https://doi.org/10.1117/12.2257980
https://doi.org/10.1117/12.2257980
Publikováno v:
Journal of Algebra. 200:279-311
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6ad2c068c28afa6be2c072686a38464a
https://doi.org/10.1006/jabr.1997.7207
https://doi.org/10.1006/jabr.1997.7207
Autor:
Jaime Erazo, Thomas Korb
Publikováno v:
The John Zink Hamworthy Combustion Handbook, Second Edition ISBN: 9781439839645
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0c4b2ec2cc86446c92334151fdf6052a
https://doi.org/10.1201/b13893-9
https://doi.org/10.1201/b13893-9
Publikováno v:
Communications in Algebra. 24:2177-2200
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::da05c70db6355842cc12a9e5dcdb2ca6
https://doi.org/10.1080/00927879608825692
https://doi.org/10.1080/00927879608825692
We apply the real-time renormalization group (RG) in nonequilibrium to an arbitrary quantum dot in the Coulomb blockade regime. Within one-loop RG-equations, we include self-consistently the kernel governing the dynamics of the reduced density matrix
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a6cbddc3914455b35b8eb602781b872c
http://arxiv.org/abs/0705.3200
http://arxiv.org/abs/0705.3200
We study nonequilibrium quantum transport through a mesoscopic wire coupled via local exchange to a ferromagnetic spin chain. Using the Keldysh formalism in the self-consistent Born approximation, we identify fingerprints of the magnetic polaron stat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a8d127183644f9b005cdd266b2e2200f