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Publikováno v:
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Advanced process control (APC) is widely used in semiconductor manufacturing to adjust process parameters, ensuring a high product quality, while WIP flow optimization systems for scheduling & dispatching make decisions by assigning lots to tools for
Publikováno v:
Proceedings of the 2006 Winter Simulation Conference.
Publikováno v:
International Journal of Industrial and Systems Engineering. 6:441
A large body of literature exists on algorithms and approaches for model-based production scheduling; however, very few of these developments have made it to the production shop floor. One of the major obstacles for implementation of model-based sche