Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Thomas Dr Scheiter"'
Autor:
Klaus-Günter Oppermann, C. Hierold, D. Behrend, Max Steger, B Clasbrummel, E. Landgraf, Hergen Kapels, D Etzrodt, D. Wenzel, Thomas Dr Scheiter
Publikováno v:
Sensors and Actuators A: Physical. 73:58-67
A new low power integrated pressure sensor system with digital output (1 bit PDM signal) for medical applications is presented. The absolute pressure sensor comprising 400 nm thick surface micromachined polysilicon membranes for capacitive pressure d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8862f92d809d0d76fd57c5a0839d6c84
https://doi.org/10.1016/s0924-4247(98)00255-6
https://doi.org/10.1016/s0924-4247(98)00255-6
Autor:
Thomas Dr Scheiter, K.-G. Oppermann, Hergen Kapels, W.M. Werner, Max Steger, Hans-Joerg Timme, C. Hierold
Publikováno v:
Sensors and Actuators A: Physical. 67:211-214
We report a novel process for the full integration of surface-micromachined pressure-sensor cells into a standard BiCMOS process. Only the standard layers of the BiCMOS process are used to build up the sensor and only one additional photolithography
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::af038809eeb857ef3b2a32549625ea4a
https://doi.org/10.1016/s0924-4247(98)00029-6
https://doi.org/10.1016/s0924-4247(98)00029-6
Publikováno v:
Sensors and Actuators A: Physical. 47:593-597
Results on a new approach for the monolithic integration of micromechanics and electronics are presented. The same process steps and layers can be used for both the mechanical and the electronic elements. This is a promising process concept for integ
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d0fdf756a2f2d9049887b73d1b2230b0
https://doi.org/10.1016/0924-4247(94)00969-o
https://doi.org/10.1016/0924-4247(94)00969-o
Publikováno v:
1996 IEEE Ultrasonics Symposium. Proceedings.
The paper presents a new technology for electrostatically driven ultrasound transducers, processed by only a few additional steps within a standard BiCMOS process. Measurements of the test structures showed good acoustic properties especially for app
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::754e162c790a4249e4023d210587e7f1
https://doi.org/10.1109/ultsym.1996.584150
https://doi.org/10.1109/ultsym.1996.584150
Autor:
Max Steger, A. Hildebrandt, Thomas Dr Scheiter, B. Mensching, C. Hierold, R. Tielert, U. Naher
Publikováno v:
Proceedings of Ninth International Workshop on Micro Electromechanical Systems.
A pure CMOS integrated accelerometer was realised using surface micromachining as structural technique. The samples were fabricated by a 14 mask 0.8 /spl mu/m CMOS standard process in a Siemens production line. Only the standard layers of the process
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a6552a0f84cd102c12f9afe441be906c
https://doi.org/10.1109/memsys.1996.493849
https://doi.org/10.1109/memsys.1996.493849
Autor:
Thomas Dr Scheiter, D. Etuodt, E. Landgraf, D. Behrend, Hergen Kapels, B. Clasbrumme, D. Wenzel, Max Steger, C. Hierold, Klaus-Günter Oppermann
Publikováno v:
Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176).
A new low power integrated pressure sensor system with digital output (1 bit PDM signal) for medical applications is presented. The absolute pressure sensor comprising 400 nm thick surface micromachined polysilicon membranes for capacitive pressure d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::629e01f727af5222ffd0623975c03abc
https://doi.org/10.1109/memsys.1998.659820
https://doi.org/10.1109/memsys.1998.659820
Publikováno v:
Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176).
The knowledge of the cavity pressure and the tightness of sealed surface micromachined membranes is essential for the description of their behavior and for the evaluation of their long-term stability. We are presenting a novel procedure to determine
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::97e4da8adce060627979e43f79b0086a
https://doi.org/10.1109/memsys.1998.659817
https://doi.org/10.1109/memsys.1998.659817