Zobrazeno 1 - 10
of 28
pro vyhledávání: '"Thierry Sarnet"'
Autor:
Yohann Spiegel, Philippe Delaporte, Ben Franta, Eric Mazur, Thierry Sarnet, Maria Isabel Sánchez
Publikováno v:
physica status solidi (a)
physica status solidi (a), Wiley, 2021, 218 (7), pp.2000550. ⟨10.1002/pssa.202000550⟩
physica status solidi (a), 2021, 218 (7), pp.2000550. ⟨10.1002/pssa.202000550⟩
physica status solidi (a), Wiley, 2021, 218 (7), pp.2000550. ⟨10.1002/pssa.202000550⟩
physica status solidi (a), 2021, 218 (7), pp.2000550. ⟨10.1002/pssa.202000550⟩
International audience
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0fe7a1d78562bc03d16519a9b7f8927a
https://hal.archives-ouvertes.fr/hal-03450562
https://hal.archives-ouvertes.fr/hal-03450562
Publikováno v:
Spectrochimica Acta Part B: Atomic Spectroscopy
Spectrochimica Acta Part B: Atomic Spectroscopy, 2018, 150, pp.77-85. ⟨10.1016/j.sab.2018.10.011⟩
Spectrochimica Acta Part B: Atomic Spectroscopy, Elsevier, 2018, 150, pp.77-85. ⟨10.1016/j.sab.2018.10.011⟩
Spectrochimica Acta Part B: Atomic Spectroscopy, 2018, 150, pp.77-85. ⟨10.1016/j.sab.2018.10.011⟩
Spectrochimica Acta Part B: Atomic Spectroscopy, Elsevier, 2018, 150, pp.77-85. ⟨10.1016/j.sab.2018.10.011⟩
International audience; Elemental analyses via calibration-free laser-induced breakdown spectroscopy (LIBS) usually suffer low sensitivity due to continuum emission generated by the plasma in local thermodynamic equilibrium. Here we propose a two-ste
Autor:
S. P. Banerjee, Panayiotis Siozos, Michalis Loulakis, Marc Sentis, Thierry Sarnet, Demetrios Anglos
Publikováno v:
Applied Surface Science
Applied Surface Science, 2017, 418, pp.542-547. ⟨10.1016/j.apsusc.2016.11.136⟩
Applied Surface Science, Elsevier, 2017, 418, pp.542-547. ⟨10.1016/j.apsusc.2016.11.136⟩
Applied Surface Science, 2017, 418, pp.542-547. ⟨10.1016/j.apsusc.2016.11.136⟩
Applied Surface Science, Elsevier, 2017, 418, pp.542-547. ⟨10.1016/j.apsusc.2016.11.136⟩
The potential of laser induced breakdown spectroscopy (LIBS) as a non-contact probe, for characterizing organic photovoltaic devices during selective laser scribing, was investigated. Samples from organic solar cells were studied, which consisted of
Publikováno v:
Applied Surface Science
Applied Surface Science, Elsevier, 2019, ⟨10.1016/j.apsusc.2019.06.234⟩
Applied Surface Science, 2019, ⟨10.1016/j.apsusc.2019.06.234⟩
Applied Surface Science, Elsevier, 2019, ⟨10.1016/j.apsusc.2019.06.234⟩
Applied Surface Science, 2019, ⟨10.1016/j.apsusc.2019.06.234⟩
International audience; The surface roughness of picosecond laser micromachined sidewalls in silicon is investigated 16 theoretically and experimentally by varying the laser fluence, the focal spot size and the crater overlap. 17 It is shown that the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::08b4233eec29e1a8cc70477f004a3338
https://hal.archives-ouvertes.fr/hal-02165681
https://hal.archives-ouvertes.fr/hal-02165681
Autor:
V. Goubier, Antoine Corbin, L. Fares, A. Sikora, Thierry Sarnet, Marc Sentis, Anne Delobbe, Jérôme Adrian
Publikováno v:
Applied Surface Science
Applied Surface Science, Elsevier, 2017, 418, pp.607-615. ⟨10.1016/j.apsusc.2016.12.009⟩
Applied Surface Science, 2017, 418, pp.607-615. ⟨10.1016/j.apsusc.2016.12.009⟩
Applied Surface Science, Elsevier, 2017, 418, pp.607-615. ⟨10.1016/j.apsusc.2016.12.009⟩
Applied Surface Science, 2017, 418, pp.607-615. ⟨10.1016/j.apsusc.2016.12.009⟩
In order to check the manufacturing quality of electronic components using electron microscopy, the area of interest must be exposed. This requires the removal of a large quantity of matter without damaging the surrounding area. This step can be acco
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::54d5fe8cc751473588c6f8093bd5f65f
https://hal.archives-ouvertes.fr/hal-02138445
https://hal.archives-ouvertes.fr/hal-02138445
Autor:
Marc Sentis, A. Sikora, Thierry Sarnet, Jérôme Adrian, V. Goubier, A. Delobbe, L. Fares, A. Corbin
Publikováno v:
2017 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC).
Microchips are more and more complex and designed in thick 3 dimensional packages. In order to access and characterize by electron microscopy (SEM and TEM) any detected defect responsible for malfunction of the device, a large quantity of matter need
Autor:
Fuccio Cristiano, V. Vervisch, Yannick Larmande, Pier-Francesco Fazzini, Frank Torregrosa, H. Etienne, Marc Sentis, Thierry Sarnet, Philippe Delaporte
Publikováno v:
Applied Surface Science. 255:5647-5650
Today, the main challenges for the realization of the source/drain extensions concern the ultra-low energy implantation and the activation of the maximum amount of dopants with a minimized diffusion. Among the different annealing processes, one solut
Autor:
S. Martinuzzi, I. Perichaud, V. Vervisch, Marc Sentis, Ph. Delaporte, H. Etienne, Thierry Sarnet, Mathieu Halbwax, Frank Torregrosa
Publikováno v:
Thin Solid Films
Thin Solid Films, 2008, 516, pp.6791-6795. ⟨10.1016/j.tsf.2007.12.117⟩
Thin Solid Films, Elsevier, 2008, 516 (20), pp.6791-6795
Thin Solid Films, 2008, 516 (20), pp.6791-6795
Thin Solid Films, Elsevier, 2008, 516, pp.6791-6795. ⟨10.1016/j.tsf.2007.12.117⟩
Thin Solid Films, 2008, 516, pp.6791-6795. ⟨10.1016/j.tsf.2007.12.117⟩
Thin Solid Films, Elsevier, 2008, 516 (20), pp.6791-6795
Thin Solid Films, 2008, 516 (20), pp.6791-6795
Thin Solid Films, Elsevier, 2008, 516, pp.6791-6795. ⟨10.1016/j.tsf.2007.12.117⟩
We have prepared absorbing structures for photovoltaic cells with different nanotexturization, obtained by means of a femtosecond laser, without the use of corrosive gas (under vacuum). To take in account the 3D structured front surface, the emitter
Autor:
Mathieu Halbwax, Jörg Hermann, Marc Sentis, Thierry Sarnet, L. Fares, G. Haller, Ph. Delaporte
Publikováno v:
Applied Surface Science. 254:911-915
The latest International Technology Roadmap for Semiconductors (ITRS) has highlighted the detection and analysis of defects in Integrated Circuits (IC) as a major challenge faced by the semiconductor industry. Advanced tools used today for defect cro
Autor:
Dominique Débarre, G. Kerrien, Jacques Boulmer, Kuniyuki Kakushima, C. Laviron, M. Hernandez, Thierry Sarnet, Alain Bosseboeuf, Nourdin Yaakoubi, Elisabeth Dufour-Gergam, Tarik Bourouina, J. Venturini
Publikováno v:
Applied Surface Science. 247:537-544
The future CMOS generations for microelectronics will require advanced doping techniques capable to realize ultra-shallow, highly-doped junctions with abrupt profiles. Recent experiments have shown the potential capabilities of laser processing of Ul