Zobrazeno 1 - 10
of 102
pro vyhledávání: '"Theodorus S.J. Lammerink"'
Publikováno v:
Sensors and actuators. A: Physical, 234, 168-179. Elsevier
A multi-electrode differential capacitive sensing circuit is designed and realized for the read-out of a multi-axis capacitive force–torque sensor. The sensing circuit is based on a differential relaxation oscillator, to which multiple capacitances
Autor:
Marcel Ronald Katerberg, Joost Conrad Lötters, F.M. Postma, Jan Wouter van de Geest, Remco J. Wiegerink, Wouter Sparreboom, J. Haneveld, Jarno Groenesteijn, Theodorus S.J. Lammerink
Publikováno v:
Micromachines; Volume 4; Issue 1; Pages: 22-33
Micromachines, Vol 4, Iss 1, Pp 22-33 (2013)
Micromachines, 4(1), 22-33. MDPI
Micromachines, Vol 4, Iss 1, Pp 22-33 (2013)
Micromachines, 4(1), 22-33. MDPI
In this paper we demonstrate a compact ready-to-use micro Coriolis mass flow meter. The full scale flow is 1 g/h (for water at a pressure drop < 1 bar). It has a zero stability of 2 mg/h and an accuracy of 0.5% reading for both liquids and gases. The
Autor:
Jarno Groenesteijn, Theodorus S.J. Lammerink, Remco J. Wiegerink, J. Haneveld, Joost Conrad Lötters
Publikováno v:
Sensors and actuators. A: Physical, 186, 48-53. Elsevier
In this paper we present Finite Element models to optimize the Lorentz force actuation of a micro Coriolis mass flow sensor. These models specify six different configurations for the permanent magnets used to create the magnetic field for the actuati
Autor:
R.A. Brookhuis, M.J. de Boer, Theodorus S.J. Lammerink, Michael Curt Elwenspoek, Remco J. Wiegerink
Publikováno v:
Sensors and actuators. A: Physical, 182(182), 28-33. Elsevier
A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate such sensors in a glove that will determine the complete mechanical interaction between the human hand
Autor:
Gijsbertus J.M. Krijnen, A.M.K. Dagamseh, Theodorus S.J. Lammerink, Remco J. Wiegerink, C.M. Bruinink, M.L. Kolster
Publikováno v:
Sensors and actuators. A: Physical, 162(2), 355-360. Elsevier
In-plane linear displacements of microelectromechanical systems are measured with subnanometer accuracy by observing the periodic micropatterns with a charge-coupled device camera attached to an optical microscope. The translation of the microstructu
Publikováno v:
Procedia chemistry, 1(1):10.1016/j.proche.2009.07.363, 1455-1458. Elsevier
Recently, we proposed a fabrication technology to realize fluidic channels at the surface of a silicon wafer [1]. The channels have semi-circular cross section and a flat top so that low hydraulic resistance is combined with easy integration of actua
Autor:
Theodorus S.J. Lammerink, Remco J. Wiegerink, C.M. Bruinink, Gijsbertus J.M. Krijnen, A.M.K. Dagamseh
Publikováno v:
Procedia chemistry, 1(1):10.1016/j.proche.2009.07.222, 891-894. Elsevier
Flow sensor arrays can be used to extract spatio-temporal flow signatures rather than average or local flow quantities. We look at the equivalent of a fish lateral-line sensor array in air and assess the ability of our artificial hairs flow-sensor ar
Autor:
J. Tangenberg, Theodorus S.J. Lammerink, R.H.M. Sanders, J.W.Th. Eikenbroek, H. Moddejonge, Remco J. Wiegerink, D. Lierop, A.A. Kuijpers
Publikováno v:
Procedia chemistry, 1(1):10.1016/j.proche.2009.07.326, 1307-1310. Elsevier
This paper describes the design and realization of an electrostatic actuated MEMS mirror operating at a resonance frequency of 23.5 KHz with a PLL feedback loop. The design is based upon a thorough understanding of the (non-linear) dynamical behavior
Autor:
Marcel Dijkstra, Johan W. Berenschot, de M.J. Boer, Theodorus S.J. Lammerink, Michael Curt Elwenspoek, Remco J. Wiegerink
Publikováno v:
Sensors and actuators. A: Physical, 143(08332/1):10.1016/j.sna.2007.12.005, 1-6. Elsevier
A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for water flow up to flow rates in the order of 300 nl min-1. A versatile technological concept is used to realize a sensor with a thermally isolated freely s
Autor:
Marcel Dijkstra, Michael Curt Elwenspoek, M.J. de Boer, Johan W. Berenschot, Remco J. Wiegerink, Theodorus S.J. Lammerink
Publikováno v:
Journal of micromechanics and microengineering, 17(LNCS4549/10), 1971-1977. Institute of Physics (IOP)
MEMS fluidic devices often require the integration of transducer structures with freely suspended microchannels. In this paper a versatile microchannel fabrication concept is presented, allowing for easy fluidic interfacing and integration of transdu