Zobrazeno 1 - 10
of 319
pro vyhledávání: '"Th. Kruck"'
Autor:
M. Schober, Th. Kruck
Publikováno v:
Microelectronic Engineering. :121-126
The increasing demand for faster microelectronic circuits with improved performance will force fundamental changes in future semiconductor manufacturing. The realization of deep submicron feature sizes in ultra-large-scale integration (ULSI) devices
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::97ee4c920952b9f654d6f9a1feb5cfc4
https://doi.org/10.1016/s0167-9317(97)00102-0
https://doi.org/10.1016/s0167-9317(97)00102-0
Publikováno v:
Applied Surface Science. 91:187-191
The concept of “molecular engineering” has been employed to systematically influence the physical and chemical properties of metalorganic compounds with the aim of using them as precursors in CVD processes. As a result of our studies the compound
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d26e71378cf2d0daa50d566b39bd13bb
https://doi.org/10.1016/0169-4332(95)00117-4
https://doi.org/10.1016/0169-4332(95)00117-4
Publikováno v:
Applied Surface Science. 86:504-508
Laser-assisted deposition of gold is investigated as a technique for structured metallization of PI. Gold lines are written from MeAuPMe 3 dissolved in toluene or DME by means of an argon laser. The writing speed of the laser process typically is 1 m
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0a7598af0d82696c5c25622cd70a5ffa
https://doi.org/10.1016/0169-4332(94)00460-9
https://doi.org/10.1016/0169-4332(94)00460-9
Publikováno v:
Materials Science and Engineering: B. 17:104-107
The increasing order of system integration in future chip generations and the demand for new, more sophisticated electronic materials require the development of new processes. A very promising method for generating these materials under convenient co
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bfcfe0bfe18c1a2e2c29bc0768e73365
https://doi.org/10.1016/0921-5107(93)90089-6
https://doi.org/10.1016/0921-5107(93)90089-6
Publikováno v:
Micro System Technologies 90 ISBN: 9783642456800
An apparatus was set up for laser induced chemical vapor deposition of gold on polyimide. Electrical interconnects were written by thermal decomposition of an organometallic gold compound in an argon ion laser focus. The low decomposition temperature
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::175c15eac9c3e837342b78dc3e0d78b1
https://doi.org/10.1007/978-3-642-45678-7_46
https://doi.org/10.1007/978-3-642-45678-7_46
Publikováno v:
Zeitschrift f�r anorganische und allgemeine Chemie. 405:95-100
SnBr3-nCl-Ionen (n = 0–2) reagieren mit den Hexacarbonylen von Chrom, Molybdan und Wolfram zu den anionischen Monosubstitutionsprodukten [M(CO)5SnBR3−nCln]−. Sie warden den analogen Trichlorstannido-carbonylmetallat(0)-Komplexen gegenubergestel
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bec63bbb84e66c3da46d6a62568c7800
https://doi.org/10.1002/zaac.19744050110
https://doi.org/10.1002/zaac.19744050110
Publikováno v:
Le Journal de Physique Colloques. 49:C4-541
BSG with constant composition (ca. 4.7 wt% B) was deposited using Tris(trimethylsiloxy) boron B[OSi(CH 3 )3] 3 in a standard LPCVD system. The optimum deposition conditions are 800 °C, 105 Pa (800 mTorr) and 280 sccm O 2 purge. The films are chemica
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::74e690623924d64b7e95ff143bf402a6
https://doi.org/10.1051/jphyscol:19884113
https://doi.org/10.1051/jphyscol:19884113
Publikováno v:
Le Journal de Physique Colloques. 50:C5-747
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::283da612fbbf203288c0e4e1bd6ff464
https://doi.org/10.1051/jphyscol:1989590
https://doi.org/10.1051/jphyscol:1989590
Publikováno v:
Zeitschrift f�r anorganische und allgemeine Chemie. 414:277-283
In Methylenchlorid setzt sich [As(C6H5)4][SnF3] glatt mit den Metallhexacarbonylen zu den Arsoniumsalzen der Pentacarbonyl-trifluorstannido-metallat(O)-Komplexe [M(CO)5SnF3]− (M Cr, Mo, W) um. Mit [N(C2H5)4][SnJ3] konnte in THF-Losung nur uber das
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::69d1a6b93440731a893ce713384df9ca
https://doi.org/10.1002/zaac.19754140312
https://doi.org/10.1002/zaac.19754140312
Publikováno v:
Zeitschrift f�r anorganische und allgemeine Chemie. 422:59-64
Unter UV-Bedingungen in THF liefern [SnCl3]−-Ionen mit den Metall(0)-trifluorphosphinen von Nickel, Eisen und Molybdan die Metallat(0)-Komplexe [Ni(PF3)3SnCl3]−, [Fe(PF3)3(SnCl3)2]2− und [Mo(PF3)5SnCl3]−. Hingegen bildet das bei Substitutions
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4cd4506ce05ab56f4157a8863fda5d90
https://doi.org/10.1002/zaac.19764220108
https://doi.org/10.1002/zaac.19764220108