Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Tetsuya Yukimoto"'
Autor:
Hiroshi Kawaura, Tatsuo Ishijima, Tetsuya Yukimoto, Yoshihiko Uesugi, Genki Ozeki, Yasunori Tanaka, Yusuke Nakano, Y Sugiyama
Publikováno v:
Plasma Chemistry and Plasma Processing. 41:85-108
In this paper, numerical calculations were made for Ar loop-type inductively coupled thermal plasma (loop-ICTP). The loop-ICTP was developed originally by the authors’ group for rapid surface modification of large areas. Loop-ICTP is sustained with
Autor:
Mai Kai Suan Tial, Hiroshi Kawaura, Tatsuo Ishijima, Takumi Tsuchiya, Tetsuya Yukimoto, Yuji Maruyama, Yoshihiko Uesugi, Yasunori Tanaka, A. Fujita
Publikováno v:
Plasma Chemistry and Plasma Processing. 38:599-620
This paper describes the use of loop-type inductively coupled thermal plasmas (loop-ICTP) for two-dimensional (2D) rapid oxidation processing. The unique and original loop-ICTP torch has been developed for large-area rapid materials processing. We ap
Autor:
Yasunori Tanaka, Hiroshi Kawaura, Tatsuo Ishijima, Hiromitsu Irie, Tetsuya Yukimoto, Yuji Maruyama, Takumi Tsuchiya, Mai Kai Suan Tial, Yoshihiko Uesugi
Publikováno v:
IEEE Transactions on Plasma Science. 44:3164-3171
This paper describes the application of a loop type of inductively coupled thermal plasmas (loop-ICTPs) to high-speed oxidation processing. We earlier developed a unique loop-ICTP for large-area thermal plasma materials processing. In this applicatio