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pro vyhledávání: '"Tetsuya Sakanishi Keisuke Utsumi"'
Publikováno v:
Energy Procedia. 37:1012-1019
CVD (chemical vapor deposition) procedures were investigated by using a counter diffusion CVD method. The effects of silica precursors on the hydrogen permeation properties of the silica membranes were discussed. 5 types of silica alkoxides (tetramet