Zobrazeno 1 - 10
of 86
pro vyhledávání: '"Tetsuya Makimura"'
Autor:
Jürgen Ihlemann, Tetsuya Makimura
Publikováno v:
Handbook of Laser Micro-and Nano-Engineering ISBN: 9783319695372
Handbook of Laser Micro-and Nano-Engineering
Handbook of Laser Micro-and Nano-Engineering ISBN: 9783030636463
Handbook of Laser Micro-and Nano-Engineering
Handbook of Laser Micro-and Nano-Engineering ISBN: 9783030636463
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::da754448bfc96c4504d7b65ec67a47c4
https://doi.org/10.1007/978-3-319-69537-2_55-1
https://doi.org/10.1007/978-3-319-69537-2_55-1
Autor:
Bowen Li, Hiroyuki Hara, Yuhei Suzuki, Goki Arai, Takeshi Higashiguchi, Hayato Ohashi, Weihua Jiang, Tetsuya Makimura, Sakaue, Hiroyuki A., Chihiro Suzuki, Daiji Kato, Izumi Murakami, Dunne, Padraig, Elaine Long, Sheridan, Paul, Ximeng Chen, O'Sullivan, Gerry
Publikováno v:
Journal of Applied Physics; 8/21/2015, Vol. 118 Issue 7, p073302-1-073302-8, 8p, 3 Charts, 8 Graphs
Publikováno v:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII.
Polydimethylsiloxane (PDMS) is a material used for bio-chips and micro total analysis systems / lab-on-chips. For further development, it is inevitable to develop a technique to fabricate precise structures on micrometer scale at high aspect ratio. I
Autor:
Hayato Ohashi, Takeshi Higashiguchi, Bowen Li, Yuhei Suzuki, Masato Kawasaki, Tatsuhiko Kanehara, Yuya Aida, Shuichi Torii, Tetsuya Makimura, Weihua Jiang, Dunne, Padraig, O'Sullivan, Gerry, Nobuyuki Nakamura
Publikováno v:
Journal of Applied Physics; 2014, Vol. 115 Issue 3, p1-5, 5p
Publikováno v:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII.
Polydimethylsiloxane (PDMS) is a material used for cell culture substrates / bio-chips and micro total analysis systems / lab-on-chips due to its flexibility, chemical / thermo-dynamic stability, bio-compatibility, transparency and moldability. For f
Autor:
Yoshiki Kondo, Tadashi Hatano, Toshiki Tamura, Masaharu Nishikino, Hiroyuki Hara, Hiroki Oikawa, Thanh-Hung Dinh, Gerry O'Sullivan, Yoichi Yamamoto, Masahiko Ishino, Takeo Ejima, Shigeru Ohta, Yuichi Ono, Ken Kitano, Padraig Dunne, Takeshi Higashiguchi, Tetsuya Makimura
Publikováno v:
The Review of scientific instruments. 88(2)
Autor:
Masaharu Nishikino, Takeo Ejima, Yoichi Yamamoto, Padraig Dunne, Yuichi Ono, Takeshi Higashiguchi, Gerry O'Sullivan, Shigeru Ohta, Masahiko Ishino, Hiroki Oikawa, Tetsuya Makimura, Hiroyuki Hara, Thanh-Hung Dinh, Yoshiki Kondo, Tadashi Hatano, Toshiki Tamura, Ken Kitano
Publikováno v:
The Review of scientific instruments. 87(12)
A flat-field grazing incidence spectrometer operating on the spectral region from 1 to 10 nm was built for research on physics of high temperature and high energy density plasmas. It consists of a flat-field grating with 2400 lines/mm as a dispersing
Autor:
Kota Okazaki, Akihiko Takahashi, Kouichi Murakami, Tatsuo Okada, Daisuke Nakamura, Hiroyuki Niino, Shuichi Torii, Tetsuya Makimura
Publikováno v:
Journal of Laser Micro/Nanoengineering. 6:235-238
*1 Institute of Applied Physics, University of Tsukuba, 1-1-1 Ten'nodai, Tsukuba, Ibaraki 305-8573, bk200820379@s.bk.tsukuba.ac.jp *2 Graduate School of Information Sciences and Electrical Engineering, Kyushu University, 744 Motooka, Nishi, Fukuoka 8
Publikováno v:
Electronics and Communications in Japan. 94:30-35
Silica glass can be ablated using focused laser plasma soft X-rays. The ablation technique enables us to fabricate trenches with a width as narrow as 50 nm. In the present paper, we have investigated the nano-ablation process. The soft X-ray irradiat
Autor:
Tatsuo Okada, Koyo Murakami, Daisuke Nakamura, Akihiko Takahashi, Hiroyuki Niino, Tetsuya Makimura, Shuichi Torii, K. Okazaki
Publikováno v:
Applied Physics A. 104:593-599
We investigated a simple and productive micromachining method of silica glass by ablation using a TEA CO2 laser (10.6 μm) with a spatial resolution down to sub-wavelength scale. The silica glass was irradiated by the TEA CO2 laser light through a co