Zobrazeno 1 - 10
of 14
pro vyhledávání: '"Tetsuro Makita"'
Autor:
Tatsuki Okamoto, Manabu Hashimoto, Atsushi Michimori, Haruhisa Okuda, Kousuke Hirasawa, Tetsuro Makita, Yukio Sato, Naoki Shiramatsu
Publikováno v:
The Japanese journal of ergonomics. 40:315-322
見やすく疲れない単眼式ウェアラブルディスプレイを開発した. 焦点深度が深く眼球の調節状態によらず映像を見ることができる. すべての光線は使用者の瞳孔中心付近を通過するため,
Autor:
Mikio Yamamuka, Teruo Shibano, H. Ogata, Akimasa Yuuki, Tsuyoshi Horikawa, Noboru Mikami, H. Abe, Kouichi Ono, Tetsuro Makita, N. Hirano, H. Maeda
Publikováno v:
Proceedings of International Electron Devices Meeting.
Simple stacked cell capacitors for 1 Gbit DRAMs have been constructed with a thick storage node of ruthenium (Ru) and high dielectric constant CVD-(Ba,Sr)TiO/sub 3/ films of equivalent oxide thickness teq=0.50 nm with an excellent step coverage. A st
Publikováno v:
MRS Proceedings. 361
We have investigated influences of Ti sources on properties of (Ba,Sr)TiO3 [BST] films prepared on Pt/SiO2/Si substrates by liquid source chemical vapor deposition (liquid source CVD): TiO(DPM)2 [titanyl bis (dipivaloylmethanato), TiO(C11 H19O2)2], T
Autor:
Tsuyoshi Horikawa, Masahiro Nunoshita, Noboru Mikami, Hiroshi Kuroki, Tetsuro Makita, Masayuki Kataoka, Jyunji Tanimura, Kazuhiko Sato
Publikováno v:
MRS Proceedings. 284
Thin films of (BaxSrj-x)TiO3 (BST) deposited by RF sputtering have been studied for the application to the capacitor material of dynamic random access memory (DRAM). The effects of film structures on the dielectric constant and the leakage current we
Publikováno v:
Japanese Journal of Applied Physics. 35:729
Thermal desorption characteristics of (Ba, Sr)TiO3 [BST] thin films prepared by metalorganic chemical vapor deposition (CVD) using liguid sources have been studied, together with their crystallinity and electrical properties. Thermal desorption was o
Autor:
Koichiro Tsutahara, Kouichi Ono, Akimasa Yuuki, Takaaki Kawahara, Mikio Yamamuka, Yasuji Matsui, Tetsuro Makita
Publikováno v:
Japanese Journal of Applied Physics. 33:5897
Thin films of (Ba, Sr)TiO3 with high dielectric constant were prepared on Pt/SiO2/Si substrates of 6-inch-diameter by chemical vapor deposition using liquid sources. Ba(DPM)2 and Sr(DPM)2 dissolved into tetrahydrofuran were vaporized in a vaporizer a
Autor:
Takeharu Kuroiwa, Noboru Mikami, Tsuyoshi Horikawa, Tetsuro Makita, Kazunao Sato, Jyunji Tanimura, Yoshikazu Tsunemine
Publikováno v:
Japanese Journal of Applied Physics. 33:5187
Dielectric properties of (Ba0.5Sr0.5)TiO3 and (Ba0.75Sr0.25)TiO3 thin films have been investigated, focusing on the effects of film structure and Ba/Sr compositions on the dielectric properties. Dielectric constant of the films increased with increas
Autor:
Takaaki Kawahara, Noboru Mikami, Kouichi Ono, Mikio Yamamuka, Jiro Naka, Tetsuro Makita, Akimasa Yuuki
Publikováno v:
Japanese Journal of Applied Physics. 33:5129
Thin films of (Ba, Sr)TiO3 (BST) with high dielectric constant were prepared on Pt/ SiO2/Si substrates of 6-inch-diameter by liquid source chemical vapor deposition using Ba(DPM)2, Sr(DPM)2 and TiO(DPM)2 (DPM=dipivaloylmethanato; C11H19O2) dissolved
Autor:
Noboru Mikami, Masahiro Nunoshita, Tsuyoshi Horikawa, Junji Tanimura, Kazunao Sato, Masayuki Kataoka, Tetsuro Makita
Publikováno v:
Japanese Journal of Applied Physics. 32:4126
Thin films of (Ba0.65Sr0.35)TiO3 (BST) have been prepared by an rf-sputtering method at substrate temperatures of 500 to 700°C. The dielectric constant of these films ranges from 190 to 700 at room temperature. This value changes with the grain size
Autor:
Takeharu Kuroiwa, Mikio Yamamuka, Tsuyoshi Horikawa, Noboru Mikami, Akimasa Yuuki, Tatsuo Oomori, Kouichi Ono, Takaaki Kawahara, Tetsuro Makita, Teruo Shibano
Publikováno v:
Scopus-Elsevier
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c0fec8ac6ae5d2d7569816f644ab7e06
http://www.scopus.com/inward/record.url?eid=2-s2.0-0031130240&partnerID=MN8TOARS
http://www.scopus.com/inward/record.url?eid=2-s2.0-0031130240&partnerID=MN8TOARS