Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Tetsuji Onuki"'
Autor:
Jumpei Fukui, Volker Berghof, Shigeo Mizoroke, Tetsuji Onuki, Hamid R. Khorram, Makoto Osanai, Susumu Hagiwara
Publikováno v:
2012 SEMI Advanced Semiconductor Manufacturing Conference.
Similar to IC manufacturing, Cost of Ownership (CoO) and enhanced productivity are key focus areas for Microelectromechanical Systems (MEMS), Light Emitting Diodes (LED) and Air Bearing Surface (ABS) manufacturers. Here also, cost reduction can be ac
Autor:
Tetsuji Onuki, Takahiro Yamamoto, Hajime Ichikawa, Takashi Gemma, T. Umeda, Fukuda Yusuke, Shigeru Nakayama
Publikováno v:
Initiatives of Precision Engineering at the Beginning of a Millennium ISBN: 0792374142
This paper describes null interferometry at 1nm accuracy for testing aspherical surfaces of sub-mm deviation from the best fitting sphere. We have developed the two kinds of null compensators. The one was the null lens composed of almost “perfect
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c291f01ed9938ecc7d72730fe6750e27
https://doi.org/10.1007/0-306-47000-4_133
https://doi.org/10.1007/0-306-47000-4_133
Publikováno v:
Applied Physics Letters. 65:1569-1571
A microprocessing method for silicon (Si) without photolithography is proposed. The method consists of only two processes. Hydrogen‐terminated Si surfaces (Si‐H) were first locally anodized using scanning tunneling microscopy (STM). The non‐ano
Autor:
Tetsuji Onuki, Takahiro Yamamoto, Fukuda Yusuke, Toshiro Umeda, Shigeru Nakayama, Yuichi Takigawa, Hajime Ichikawa, Takashi Gemma
Publikováno v:
Optical Fabrication and Testing.
This paper describes null interferometry at 1nm accuracy for testing aspherical surfaces of sub-mm deviation from the best fitting sphere. We have developed the two kinds of null compensators. The one is a “null lens” composed of almost perfect s
Publikováno v:
SPIE Proceedings.
Soft X-ray microscopy, especially using the wavelength region from 2.4nxn to 4.4nxn, is expected in biology. Because the microstructure of live and thick biological specimens containing water can be observed by x-ray absorption difference of protein
Publikováno v:
Japanese Journal of Applied Physics. 32:L1574
The observation of X-ray photoelectrons induced by laser-produced plasma X-rays has been made for the very first time. Aluminum plasma X-rays were monochromatized to 5.25 nm (236 eV) using a multilayer mirror and focused to 50 µm×70 µm by the Wolt