Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Tetsu Negishi"'
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 19:1796-1799
Well-aligned carbon nanotubes were grown perpendicular to the surface of Ni substrates by hot-filament-assisted dc plasma chemical vapor deposition in a CH4/H2 plasma. It was found, from observation by a scanning electron microscope and a transmissio
Autor:
Hiroshi Kotaki, Akihide Shibata, Masayuki Nakano, Yoshiaki Kamigaki, Sugimoto Kazuo, Tetsu Negishi, Takeshi Shiomi, Noriaki Shinohara, Tetsuya Okumine, Fumiyoshi Yoshioka, Atsushi Toki
Publikováno v:
Japanese Journal of Applied Physics. 47:2684-2686
We have proposed a novel oxide–nitride–oxide (ONO)-sidewall 2-bit/cell nonvolatile memory and fabricated 70-nm-node nonvolatile memory devices. For low-pressure chemical-vapor-deposition (LPCVD)-SiN films, with increasing SiH4/NH3 mixture gas rat