Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Teruyo Nagai"'
Autor:
Hideto Miyake, Osamu Oda, Tomohiko Shibata, Shigeaki Sumiya, Kazumasa Hiramatsu, Keiichiro Asai, Mitsuhiro Tanaka, Teruyo Nagai
Publikováno v:
MRS Proceedings. 693
This paper presents the correlation between overall crystal mosaicities and dislocation behaviors of high-quality AlN epitaxial films grown on a C-plane sapphire substrate using a low-pressure metal organic vapor phase epitaxy (LP-MOVPE) method. Typi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dbc6a598cb8742a7b6938f90cb983cdf
https://doi.org/10.1557/proc-693-i9.3.1
https://doi.org/10.1557/proc-693-i9.3.1
Autor:
Keiichiro Asai, Teruyo Nagai, Yoshihiro Kida, Kazumasa Hiramatsu, Tomohiko Shibata, Osamu Oda, Hideto Miyake, Shigeaki Sumiya, Mitsuhiro Tanaka
Publikováno v:
MRS Proceedings. 693
We demonstrate high-quality epitaxial AlN films on C-plane sapphire as a new buffer layer technique for the growth of high-quality GaN. The obtained GaN films were atomically flat and the full width at half maximum (FWHM) values of the X-ray rocking
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ae6aea1d012a78453d9fdb56f740cf82
https://doi.org/10.1557/proc-693-i3.48.1
https://doi.org/10.1557/proc-693-i3.48.1