Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Teruhiro Yasuda"'
Publikováno v:
Journal of the Japan Society for Precision Engineering. 54:903-908
CO2 laser was used to induce localized thermo-chemical etching of ZrO2, Al2O3 and Si3N4 in CF4gas, and the etching characteristics were investigated. The etching rate obtained in CF4 gas was several times greater than the one obtained in air. The etc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c0d1515e2086b875793131245c247264
https://doi.org/10.2493/jjspe.54.903
https://doi.org/10.2493/jjspe.54.903
Autor:
Hidekazu Goto, Teruhiro Yasuda, Makoto Miyazaki, Yoshiteru Uematsu, Kikuji Hirose, Hachiro Tsuchiya, Yuzo Mori
Publikováno v:
Journal of the Japan Society for Precision Engineering. 55:1475-1480
The mechanisms and the characteristics of a pyrolytic process of halogen-containing gases are investigated theoretically and experimentally. A calculation method of analyzing chemical reactions on solid surfaces is proposed. The dissociation process
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6ff7515f9ff4e2b4ff5b176f42747bbe
https://doi.org/10.2493/jjspe.55.1475
https://doi.org/10.2493/jjspe.55.1475