Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Teri Baldwin-Hendricks"'
Publikováno v:
Molecular Modeling and Multiscaling Issues for Electronic Material Applications ISBN: 9781461417279
This work describes the surface energy and reactivity modeling of the Honeywell cleaner technology that has demonstrated an inorganic Bottom Anti-Reflective Coating removal solution with significantly higher removal rates and etching selectivity comp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bdbc2c9a4ce607c7e132782727e504ec
https://doi.org/10.1007/978-1-4614-1728-6_3
https://doi.org/10.1007/978-1-4614-1728-6_3
Publikováno v:
Advances in Resist Technology and Processing XX.
A sacrificial, spin-on 248nm UV absorbing organosiloxane film has been developed to enable via first trench last (VFTL) dual-damascene patterning. Amongst other design objectives one key material requirement was that the film be SiO based to facilita
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5a0df6cdcf730c57d44955a6def85af1
https://doi.org/10.1117/12.485154
https://doi.org/10.1117/12.485154
