Spectral data of refractive index and extinction coefficient for thin films of titanium group metals used for fabrication of optical microstructures.

Autor: Belousov DA; Institute of Automation and Electrometry of the SB RAS, Koptyuga Avenue, 1, Novosibirsk, 630090, Russian Federation., Terent'ev VS; Institute of Automation and Electrometry of the SB RAS, Koptyuga Avenue, 1, Novosibirsk, 630090, Russian Federation., Spesivtsev EV; Rzhanov Institute of Semiconductor Physics of SB RAS, Lavrentieva Avenue, 13, Novosibirsk, 630090, Russian Federation., Korolkov VP; Institute of Automation and Electrometry of the SB RAS, Koptyuga Avenue, 1, Novosibirsk, 630090, Russian Federation.

Publikováno v: Data in brief [Data Brief] 2019 Nov 28; Vol. 28, pp. 104903. Date of Electronic Publication: 2019 Nov 28 (Print Publication: 2020).