Výsledky vyhledávání - "Teranishi, Minami"

Conference

A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology

Autor: Yamane, Daisuke, Konishi, Toshifumi, Teranishi, Minami, Chang, Tso-Fu Mark, Chen, Chun-Yi, Toshiyoshi, Hiroshi, Masu, Kazuya, Sone, Masato, Machida, Katsuyuki

Publikováno v: AMC 2015 – Advanced Metallization Conference

This paper reports the evaluation results of the mechanical structures of MEMS (micro electro mechanical systems) sensor implemented in the integrated MEMS inertial sensor for a wide sensing range from below 0.1 G to 20 G (1 G = 9.8 m/s^2). To invest

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