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pro vyhledávání: '"Teeranon Chaiyakun"'
Autor:
Wuttichai Phae-ngam, Chanunthorn Chananonnawathorn, Tossaporn Lertvanithphol, Teeranon Chaiyakun, B. Samransuksamer, Mati Horprathum
Publikováno v:
Materiali in tehnologije. 55:65-70
Well-separated inclined nanocolumnar TiZrN films were grown on silicon-wafer substrates by reactive magnetron co-sputtering with the oblique-angle-deposition (OAD) technique. The crystal structure, thickness, morphology and chemical composition of th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::56528adbd49fb73f3d53b831a3aac6df
https://doi.org/10.17222/mit.2019.189
https://doi.org/10.17222/mit.2019.189
