Zobrazeno 1 - 10
of 39
pro vyhledávání: '"Taudt, Ch."'
Manufacturing of precise structures in MEMS, semiconductors, optics and other fields requires high standards in manufacturing and quality control. Appropriate surface topography measurement technologies should therefore deliver nm accuracy in the axi
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Within this work a scan-free, low-coherence interferometry approach for surface profilometry with nm-precision is presented. The basic setup consist of a Michelson-type interferometer which is powered by a supercontinuum light-source (Δλ = 400 - 17
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This work introduces a modified low-coherence interferometry approach for nanometer surface-profilometry. The key component of the interferometer is an element with known dispersion which defines the measurement range as well as the resolution. This
Externí odkaz:
https://tud.qucosa.de/id/qucosa%3A35098
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https://tud.qucosa.de/api/qucosa%3A35098/attachment/ATT-0/
Publikováno v:
Proceedings of SPIE; 4/29/2019, Vol. 11056, p1-7, 7p
Publikováno v:
Proceedings of SPIE; 1/7/2019, Vol. 10944, p1-8, 8p
Publikováno v:
Proceedings of SPIE; 4/16/2018, Vol. 10678, p1-8, 8p
Publikováno v:
Proceedings of SPIE; 6/29/2017, Vol. 10329, p1-6, 6p
Publikováno v:
Proceedings of SPIE; March 2019, Vol. 10925 Issue: 1 p109250L-109250L-6, 983257p
Publikováno v:
Proceedings of SPIE; March 2019, Vol. 10925 Issue: 1 p109250E-109250E-7, 983258p
Publikováno v:
Proceedings of SPIE; March 2019, Vol. 10925 Issue: 1 p109250B-109250B-11, 10815762p