Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Tatsuya Shiramizu"'
Autor:
Kenichi Ohtsuka, Masayuki Imaizumi, Yoichiro Tarui, Kazumasa Kawase, Tatsuya Shiramizu, Tetsuya Takami, Jyunji Tanimura, Keiko Fujihira, Tatsuo Ozeki
Publikováno v:
Solid-State Electronics. 49:896-901
4H–SiC(0 0 0 1) MOSFET annealed in N2O at below 1150 °C is systematically investigated. Inversion-type planar MOSFETs show higher channel mobility and lower threshold voltage by increasing anneal temperature. Through C–V measurement of n-type MO
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 135:366-371
For the hydrogen atoms adsorbed on a Si (1 0 0) surface, the processes of direct recoil by incident ions and the surface-recoil process (surface scattering of the direct recoils) are simultaneously observed at relatively low incident ion energies bel