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pro vyhledávání: '"Tatsuya Kamiya"'
High-SPL Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on 36% ScAlN Thin-Film
Publikováno v:
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 66:1488-1496
In this paper, air-coupled piezoelectric micromachined ultrasonic transducers (PMUTs) using 36% scandium-doped aluminum nitride (ScAlN) thin-film are presented. ScAlN is known to exhibit higher piezoelectric properties compared to pure AlN leading to
Autor:
Takeshi Momose, Yukihiro Shimogaki, Masakazu Sugiyama, Hideo Yamada, Hirohisa Uchida, Aiko Kondo, Tatsuya Kamiya, Yasuhiro Kitamura, Junji Ohara
Publikováno v:
The Journal of Supercritical Fluids. 105:193-200
We measured the solubility of bis-(2,2,6,6-tetramethyl-3,5-heptanedionato)copper(II) (Cu(tmhd) 2 ) in pure supercritical CO 2 (scCO 2 ) and binary mixtures of H 2 and scCO 2 at 40–100 °C and 11–20 MPa using spectrometric method. The solubility i
Autor:
Yudai Suzuki, Yukihiro Shimogaki, Masakazu Sugiyama, Stefano Ravasio, Takeshi Momose, Carlo Cavallotti, Tatsuya Kamiya
We carried out a kinetic analysis of metallorganic vapor phase epitaxy (MOVPE) of GaN to investigate the dependence of the growth rate on the process conditions as a function of residence time of the precursors in the reactor. The wafer was not rotat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a37c144d4daadab267d7ddc2826ab666
http://hdl.handle.net/11311/1013163
http://hdl.handle.net/11311/1013163
Publikováno v:
The Proceedings of the Fluids engineering conference. 2006:915-1
Publikováno v:
The Proceedings of the Fluids engineering conference. 2006:915-a