Zobrazeno 1 - 10
of 45
pro vyhledávání: '"Tatsuya Aota"'
Autor:
Takuya Okumura, Shiro Maenaka, Shuichi Takamura, Kazunori Fujita, Yusuke Kikuchi, Kazumasa Kadowaki, Tatsuya Aota
Publikováno v:
Journal of Physics D: Applied Physics. 52:375201
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::945c82c72f2869d0d2e0b6ce3414599c
https://doi.org/10.1088/1361-6463/ab2ac1
https://doi.org/10.1088/1361-6463/ab2ac1
Publikováno v:
Japanese Journal of Applied Physics. 47:4742-4745
The time-lapse observation of the electrodeposition of copper in copper sulfate solution was performed by imaging X-ray fluorescence from the copper deposition. The X-ray fluorescence was directly imaged with a full-field Wolter mirror microscope, wh
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::65bfacd0654a072737ab83b77cc8d9d1
https://doi.org/10.1143/jjap.47.4742
https://doi.org/10.1143/jjap.47.4742
Autor:
Hiroaki Nishimura, Yasukazu Izawa, Atsushi Sunahara, Yuki Nakai, Kunioki Mima, Noriaki Miyanaga, Shinsuke Fujioka, Yoshinori Shimada, Katsunobu Nishihara, Masashi Shimomura, Shinichi Namba, Takeshi Kai, Tatsuya Aota, Hirokazu Sakaguchi
Publikováno v:
The Review of Laser Engineering. 36:1125-1128
Extreme ultraviolet (EUV) radiation from laser-produced plasma has been studied for mass-production of the next generation semiconductor devices with EUV lithography. A full set of experimental databases are provided for a wide range of parameters of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8a8c445c317cc9c60263bb6b9a381c25
https://doi.org/10.2184/lsj.36.1125
https://doi.org/10.2184/lsj.36.1125
Autor:
Katsunobu Nishihara, Takayoshi Norimatsu, Y. Tao, Qincui Gu, N. Miyanaga, Akira Sasaki, Y. Shimada, M. Murakami, Hiroaki Nishimura, K. Mima, Masahiro Nakatsuka, Michiteru Yamaura, H. Yoshida, Hajime Tanuma, Shinsuke Fujioka, Kouji Tsubakimoto, Y. Izawa, Atsushi Sunahara, Keiji Nagai, K. Hashimoto, Shigeaki Uchida, Hisanori Fujita, Tatsuya Aota, W. Nishikawa, Hiromitsu Furukawa
Publikováno v:
Journal de Physique IV (Proceedings). 133:1161-1165
We have been developing an EUV light source by laser-produced plasma for the use of EUV lithography system under the Leading Project promoted by MEXT. The project aims at understanding physics of laser plasma EUV source and providing database and gui
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6759cd33b9fbb761d0e448fc8bd4cbfe
https://doi.org/10.1051/jp4:2006133237
https://doi.org/10.1051/jp4:2006133237
Autor:
Qincui Gu, Katsunobu Nishihara, Y. Tao, Atsushi Sunahara, Tatsuya Aota, Keiji Nagai, N. Miyanaga, K. Gamada, Yuzuri Yasuda, Michiteru Yamaura, Shigeaki Uchida, Y. Shimada, Y. Norimatsu, YG Kang, Hiroaki Nishimura, K. Mima, Tsuyoshi Ando, Nobuyoshi Ueda, K. Hashimoto, M. Murakami, Shinsuke Fujioka, Y. Izawa, Tomoharu Okuno, Hiromitsu Furukawa
Publikováno v:
Journal de Physique IV (Proceedings). 133:1189-1192
Properties of extreme ultraviolet (EUV) and particle emissions from laser-produced tin (Sn) plasma were experimentally investigated for use in industrial applications. Dependence of EUV emission on the initial thickness of Sn overcoat on a plastic sp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f09a604c860cae64f02580b5b7709020
https://doi.org/10.1051/jp4:2006133243
https://doi.org/10.1051/jp4:2006133243
Autor:
Yuji Matsumoto, Susumu Kato, Takeyuki Tabuchi, L. L. Losev, Eiichi Takahashi, Tatsuya Aota, Isao Okuda, Yoshiro Owadano
Publikováno v:
Optics Communications. 257:133-138
A new two-color pumping method for multi-frequency Raman generation was developed using deuterium gas combined with KrF excimer lasers. To obtain a powerful two-color radiation, the pump and its first Stokes (Stokes shift Ω = 179 cm −1 ) were simu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::847e56727b59ad7b878a699b3efbd8a5
https://doi.org/10.1016/j.optcom.2005.07.035
https://doi.org/10.1016/j.optcom.2005.07.035
Autor:
Yoshiro Owadano, Isao Okuda, L. L. Losev, Tatsuya Aota, Yuji Matsumoto, Susumu Kato, Eiichi Takahashi
Publikováno v:
Optics Communications. 247:149-152
A new simple picosecond KrF laser source was developed by the saturated amplification of sharp leading-edge pulses generated by fast Pockels cell and stimulated Raman scattering (backward Raman pulse compression and four-wave anti-Stokes generation i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bc17fc863a6162f805c532712c0ace28
https://doi.org/10.1016/j.optcom.2004.11.032
https://doi.org/10.1016/j.optcom.2004.11.032
Autor:
Yuji Tsujita, Ryuichi Tanoue, Masaru Kumegawa, Hidekazu Takano, Sadao Aoki, Kimitake Yamamoto, Tatsuya Aota, Masami Ando, Norio Watanabe, Takuji Ohhigashi, Hiroki Yokosuka
Publikováno v:
Review of Scientific Instruments. 73:2629-2633
Full-field x-ray scattering microscopic images were obtained with a Wolter mirror (×10 magnification). A synchrotron radiation white beam (4–20 keV) from a bending magnet beamline at the Photon Factory was used to obtain x-ray scattering images. T
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ce3b91c09c4faa2fffaad7fea4f33943
https://doi.org/10.1063/1.1487888
https://doi.org/10.1063/1.1487888
Publikováno v:
Le Journal de Physique IV. 11:Pr2-251
In order to increase the gain length product for the Ha line (13.4 nm) of hydrogen-like Nitrogen in the exploding type pumping of irradiating a 30 nm thick SiN membrane target with a few ps pulse, the pumping laser system is up-graded. For crucially
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8cda8a3d419062f8e8998ee6b4f1e4ef
https://doi.org/10.1051/jp4:2001246
https://doi.org/10.1051/jp4:2001246
Autor:
Kimitake Yamamoto, Tatsuya Aota, Takuji Ohigashi, Hiroki Yokosuka, Sadao Aoki, Norio Watanabe, Hidekazu Takano
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. :837-840
An X-ray fluorescence imaging microscope with a Wolter-type grazing-incidence mirror objective was constructed at beamline 39XU of SPring-8. Monochromatic X-rays in the energy range 6–10 keV were used for X-ray fluorescence excitation of the specim
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b98b024eb48859f87ac66da66fa35ff3
https://doi.org/10.1016/s0168-9002(01)00476-4
https://doi.org/10.1016/s0168-9002(01)00476-4