Zobrazeno 1 - 10
of 90
pro vyhledávání: '"Tatsuya, Yanagida"'
Autor:
Hiroaki Nakarai, Tatsuya Yanagida, Kenichi Miyao, Kouichiro Kouge, Tsukasa Hori, Hakaru Mizoguchi, Shinji Nagai, Tamotsu Abe, Saito Takashi, Yoshifumi Ueno, Yukio Watanabe, Hideyuki Hayashi
Publikováno v:
Journal of Photopolymer Science and Technology. 33:37-44
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::200a4a2d852cc3979d52d83ae1b73915
https://doi.org/10.2494/photopolymer.33.37
https://doi.org/10.2494/photopolymer.33.37
Autor:
Tatsuya Yanagida, Hiroshi Tanaka, Tsuyoshi Yamada, Yutaka Shiraishi, Takashi Saitou, Tamotsu Abe, Takeshi Kodama, Georg Soumagne, Hiroaki Nakarai, Hakaru Mizoguchi, Yukio Watanabe, Tsukasa Hori
Publikováno v:
Journal of Photopolymer Science and Technology. 32:77-86
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::48e9730f891fce0c12fd85e897986599
https://doi.org/10.2494/photopolymer.32.77
https://doi.org/10.2494/photopolymer.32.77
Autor:
Hiroaki Nakarai, Tatsuya Yanagida, Takashi Saitou, Tamotsu Abe, Tsuyoshi Yamada, Tsukasa Hori, Yutaka Shiraishi, George Sumangne, Yukio Watanabe, Hakaru Mizoguchi, Hiroshi Tanak
Publikováno v:
Extreme Ultraviolet (EUV) Lithography XII.
Gigaphoton develops CO2-Sn-LPP EUV light source which is the most promising solution as the 13.5nm high power light source for HVM EUVL. Unique and original technologies including; combination of pulsed CO2 laser and Sn droplets, dual wavelength lase
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1b9b9bfd4be2c60de2defb6eddf034c6
https://doi.org/10.1117/12.2581910
https://doi.org/10.1117/12.2581910
Autor:
Kouichiro Kouge, Kentaro Tomita, Junya Hotta, Yiming Pan, Hiroaki Tomuro, Tatsuya Yanagida, Kiichiro Uchino, Naoji Yamamoto
Publikováno v:
Japanese Journal of Applied Physics. 61:056001
Temporal evolutions of electron temperature ( T e ) and electron density ( n e ) of photoionized hydrogen plasmas, which were induced by radiation from laser-produced Sn-plasma EUV sources, were measured using the laser Thomson scattering technique.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9be157dcbaef6e3fb3b84ad939cf9385
https://doi.org/10.35848/1347-4065/ac5d25
https://doi.org/10.35848/1347-4065/ac5d25
Autor:
Mamoru Yoshimoto, Yutaka Shiraishi, Masahiko Andou, Yoshiyuki Honda, Akifumi Matsuda, Masayuki Morita, Hiroaki Tomuro, Tatsuya Yanagida
Publikováno v:
Applied Physics Express. 13(Number 11)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::347bcf5bb29b00fb99b11cb3921decb8
http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100833489
http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100833489
Autor:
Hiroaki Nakarai, Yutaka Shiraishi, Yukio Watanabe, Shinji Nagai, Kenichi Miyao, Hakaru Mizoguchi, Yoshifumi Ueno, Georg Soumagne, Hideyuki Hayashi, Takayuki Yabu, Tatsuya Yanagida, Takahiro Tatsumi, Tamotsu Abe
Publikováno v:
Extreme Ultraviolet Lithography 2020.
We report the status of CO2-Sn-LPP (Laser-produced-plasma) EUV light source that is being developed at Gigaphoton. Our unique and original technologies are; the combination of a pulsed CO2 laser with Sn droplets, dual wavelength laser application and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::522f4ac81025673766746c7f9fe1413f
https://doi.org/10.1117/12.2572689
https://doi.org/10.1117/12.2572689
Autor:
Tatsuya Yanagida, Takashi Saitou, Tsukasa Hori, Hiroaki Nakarai, Hakaru Mizoguchi, Yukio Watanabe, Yutaka Shiraishi, Tamotsu Abe, Hiroshi Tanaka, Georg Soumagne, Tsuyoshi Yamada
Publikováno v:
Extreme Ultraviolet (EUV) Lithography XI.
Gigaphoton develops CO2-Sn-LPP EUV light source which is the most promising solution as the 13.5nm high power light source for HVM EUVL. Unique and original technologies including; combination of pulsed CO2 laser and Sn droplets, dual wavelength lase
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d1c55452df1a2aee7a356f7b6de687e0
https://doi.org/10.1117/12.2549905
https://doi.org/10.1117/12.2549905
Autor:
Hiroaki TOMURO, Mengran JI, Ryo NAGATA, Koichiro KOUGE, Tatsuya YANAGIDA, Masayuki MORITA, Masahiko ANDOU, Yoshiyuki HONDA, Kiichiro UCHINO, Tsuyoshi YOSHITAKE
Publikováno v:
Plasma and Fusion Research. 17:1406005-1406005
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e8f68157d8be300922a4b07a3056cb16
https://doi.org/10.1585/pfr.17.1406005
https://doi.org/10.1585/pfr.17.1406005
Autor:
Yuta Takashima, Yoshifumi Ueno, Takayuki Yabu, Tsukasa Hori, Georg Soumagne, Shinji Nagai, Tatsuya Yanagida, Yutaka Shiraishi, Kenichi Miyao, Hideyuki Hayashi, Yukio Watanabe, Tamotsu Abe, Hiroaki Nakarai, Takashi Saito, Hakaru Mizoguchi
Publikováno v:
International Conference on Extreme Ultraviolet Lithography 2019.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::102c03c52bafc7e25d800d75bd14a417
https://doi.org/10.1117/12.2536397
https://doi.org/10.1117/12.2536397