Zobrazeno 1 - 10
of 90
pro vyhledávání: '"Tatsuya, Yanagida"'
Autor:
Hiroaki Nakarai, Tatsuya Yanagida, Kenichi Miyao, Kouichiro Kouge, Tsukasa Hori, Hakaru Mizoguchi, Shinji Nagai, Tamotsu Abe, Saito Takashi, Yoshifumi Ueno, Yukio Watanabe, Hideyuki Hayashi
Publikováno v:
Journal of Photopolymer Science and Technology. 33:37-44
Autor:
Tatsuya Yanagida, Hiroshi Tanaka, Tsuyoshi Yamada, Yutaka Shiraishi, Takashi Saitou, Tamotsu Abe, Takeshi Kodama, Georg Soumagne, Hiroaki Nakarai, Hakaru Mizoguchi, Yukio Watanabe, Tsukasa Hori
Publikováno v:
Journal of Photopolymer Science and Technology. 32:77-86
Autor:
Hiroaki Nakarai, Tatsuya Yanagida, Takashi Saitou, Tamotsu Abe, Tsuyoshi Yamada, Tsukasa Hori, Yutaka Shiraishi, George Sumangne, Yukio Watanabe, Hakaru Mizoguchi, Hiroshi Tanak
Publikováno v:
Extreme Ultraviolet (EUV) Lithography XII.
Gigaphoton develops CO2-Sn-LPP EUV light source which is the most promising solution as the 13.5nm high power light source for HVM EUVL. Unique and original technologies including; combination of pulsed CO2 laser and Sn droplets, dual wavelength lase
Autor:
Kouichiro Kouge, Kentaro Tomita, Junya Hotta, Yiming Pan, Hiroaki Tomuro, Tatsuya Yanagida, Kiichiro Uchino, Naoji Yamamoto
Publikováno v:
Japanese Journal of Applied Physics. 61:056001
Temporal evolutions of electron temperature ( T e ) and electron density ( n e ) of photoionized hydrogen plasmas, which were induced by radiation from laser-produced Sn-plasma EUV sources, were measured using the laser Thomson scattering technique.
Autor:
Hiroaki TOMURO, Mengran JI, Ryo NAGATA, Koichiro KOUGE, Tatsuya YANAGIDA, Masayuki MORITA, Masahiko ANDOU, Yoshiyuki HONDA, Kiichiro UCHINO, Tsuyoshi YOSHITAKE
Publikováno v:
Plasma and Fusion Research. 17:1406005-1406005
Autor:
Mamoru Yoshimoto, Yutaka Shiraishi, Masahiko Andou, Yoshiyuki Honda, Akifumi Matsuda, Masayuki Morita, Hiroaki Tomuro, Tatsuya Yanagida
Publikováno v:
Applied Physics Express. 13(Number 11)
Autor:
Hiroaki Nakarai, Yutaka Shiraishi, Yukio Watanabe, Shinji Nagai, Kenichi Miyao, Hakaru Mizoguchi, Yoshifumi Ueno, Georg Soumagne, Hideyuki Hayashi, Takayuki Yabu, Tatsuya Yanagida, Takahiro Tatsumi, Tamotsu Abe
Publikováno v:
Extreme Ultraviolet Lithography 2020.
We report the status of CO2-Sn-LPP (Laser-produced-plasma) EUV light source that is being developed at Gigaphoton. Our unique and original technologies are; the combination of a pulsed CO2 laser with Sn droplets, dual wavelength laser application and
Autor:
Tatsuya Yanagida, Takashi Saitou, Tsukasa Hori, Hiroaki Nakarai, Hakaru Mizoguchi, Yukio Watanabe, Yutaka Shiraishi, Tamotsu Abe, Hiroshi Tanaka, Georg Soumagne, Tsuyoshi Yamada
Publikováno v:
Extreme Ultraviolet (EUV) Lithography XI.
Gigaphoton develops CO2-Sn-LPP EUV light source which is the most promising solution as the 13.5nm high power light source for HVM EUVL. Unique and original technologies including; combination of pulsed CO2 laser and Sn droplets, dual wavelength lase
Autor:
Kentaro Tomita, Kouichiro Kouge, Naoji Yamamoto, Hiroaki Tomuro, Kiichiro Uchino, Tatsuya Yanagida, Yiming Pan, Masayuki Morita, Junya Hotta
Publikováno v:
Japanese Journal of Applied Physics. 60:066002
We observed the spatial and temporal changes of the electron density (n e) and the electron temperature (T e) of hydrogen plasmas around a laser-produced Sn plasma EUV source. The plasma parameters were measured by the laser Thomson scattering (LTS)