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pro vyhledávání: '"Tatjana L. Makarova"'
Autor:
Ilja P. Soshnikov, Lolita G. Rotkina, Alexander V. Lunev, Michael E. Gaevski, Tatjana L. Makarova
Publikováno v:
SPIE Proceedings.
The paper presents the attempt of the use of the C 60 thin films as a negativ electron beam resist. A comparative study of C 60 films polymerized by the He-Cd laser and electron beam is made. It is shown that under the exposure by laser irradiation o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bcf3695bb17cb605bf728edc2bf59d24
https://doi.org/10.1117/12.309594
https://doi.org/10.1117/12.309594
